Abstract
The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 323-326 |
| Number of pages | 4 |
| Journal | Nanotechnology |
| Volume | 14 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2003 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- photonic crystals
- silicon
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Ferrand, P., Minty, M. J., Egen, M., Ahopelto, J., Zentel, R., Romanov, S. G., & Sotomayor Torres, C. M. (2003). Micromoulding of three-dimensional photonic crystals on silicon substrates. Nanotechnology, 14(2), 323-326. https://doi.org/10.1088/0957-4484/14/2/343