Micromoulding of three-dimensional photonic crystals on silicon substrates

P. Ferrand; M.J. Minty; M. Egen; Jouni Ahopelto; R. Zentel; S.G. Romanov; C.M Sotomayor Torres

doi:10.1088/0957-4484/14/2/343

Micromoulding of three-dimensional photonic crystals on silicon substrates

P. Ferrand, M.J. Minty, M. Egen, Jouni Ahopelto, R. Zentel, S.G. Romanov, C.M Sotomayor Torres

Research output: Contribution to journal › Article › Scientific › peer-review

20 Citations (Scopus)

Abstract

The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.

Original language	English
Pages (from-to)	323-326
Number of pages	4
Journal	Nanotechnology
Volume	14
Issue number	2
DOIs	https://doi.org/10.1088/0957-4484/14/2/343
Publication status	Published - 2003
MoE publication type	A1 Journal article-refereed

Keywords

photonic crystals
silicon

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title = "Micromoulding of three-dimensional photonic crystals on silicon substrates",

abstract = "The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.",

keywords = "photonic crystals, silicon",

author = "P. Ferrand and M.J. Minty and M. Egen and Jouni Ahopelto and R. Zentel and S.G. Romanov and {Sotomayor Torres}, C.M",

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T1 - Micromoulding of three-dimensional photonic crystals on silicon substrates

AU - Ferrand, P.

AU - Minty, M.J.

AU - Egen, M.

AU - Ahopelto, Jouni

AU - Zentel, R.

AU - Romanov, S.G.

AU - Sotomayor Torres, C.M

PY - 2003

Y1 - 2003

N2 - The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.

AB - The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.

KW - photonic crystals

KW - silicon

U2 - 10.1088/0957-4484/14/2/343

DO - 10.1088/0957-4484/14/2/343

M3 - Article

VL - 14

SP - 323

EP - 326

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 2

ER -