Micromoulding of three-dimensional photonic crystals on silicon substrates

P. Ferrand, M.J. Minty, M. Egen, Jouni Ahopelto, R. Zentel, S.G. Romanov, C.M Sotomayor Torres

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)


    The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.
    Original languageEnglish
    Pages (from-to)323-326
    Number of pages4
    Issue number2
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed


    • photonic crystals
    • silicon

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    Ferrand, P., Minty, M. J., Egen, M., Ahopelto, J., Zentel, R., Romanov, S. G., & Sotomayor Torres, C. M. (2003). Micromoulding of three-dimensional photonic crystals on silicon substrates. Nanotechnology, 14(2), 323-326. https://doi.org/10.1088/0957-4484/14/2/343