Microrefrigeration by quasiparticle tunnelling in NIS and SIS junctions

J.P. Pekola, A. J. Manninen, M. M. Leivo, K. Arutyunov, J. K. Suoknuuti, T. I. Suppula, B. Collaudin

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

29 Citations (Scopus)


A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.

Original languageEnglish
Pages (from-to)485-490
Number of pages6
JournalPhysica B: Condensed Matter
Issue number1-4
Publication statusPublished - 11 May 2000
MoE publication typeA4 Article in a conference publication
Event22nd International Conference on Low Temperature Physics (LT-22) - Helsinki, Finl
Duration: 4 Aug 199911 Aug 1999


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