TY - JOUR
T1 - Microrefrigeration by quasiparticle tunnelling in NIS and SIS junctions
AU - Pekola, J.P.
AU - Manninen, A. J.
AU - Leivo, M. M.
AU - Arutyunov, K.
AU - Suoknuuti, J. K.
AU - Suppula, T. I.
AU - Collaudin, B.
N1 - Funding Information:
This work has been financially supported by the European Space Agency (ESA), the Technology Development Centre of Finland (TEKES), and the Academy of Finland (project 39081).
PY - 2000/5/11
Y1 - 2000/5/11
N2 - A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.
AB - A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.
UR - http://www.scopus.com/inward/record.url?scp=0033897978&partnerID=8YFLogxK
U2 - 10.1016/S0921-4526(99)01842-6
DO - 10.1016/S0921-4526(99)01842-6
M3 - Article in a proceedings journal
AN - SCOPUS:0033897978
SN - 0921-4526
VL - 280
SP - 485
EP - 490
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
IS - 1-4
T2 - 22nd International Conference on Low Temperature Physics (LT-22)
Y2 - 4 August 1999 through 11 August 1999
ER -