Abstract
A solid-state refrigeration method at sub-kelvin temperatures has been developed. It is based on quasiparticle tunnelling between a superconductor and a normal metal, or, between two dissimilar superconducting metals. The refrigerator is fabricated by combining nanolithography and micromachining methods. This technique has been demonstrated in both electron cooling from 0.3 to 0.1 K and in refrigeration of a dielectric platform. We describe a new fabrication method of tunnel junctions in a shadow evaporation configuration using a mechanical mask of silicon nitride.
| Original language | English |
|---|---|
| Pages (from-to) | 485-490 |
| Number of pages | 6 |
| Journal | Physica B: Condensed Matter |
| Volume | 280 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 11 May 2000 |
| MoE publication type | A4 Article in a conference publication |
| Event | 22nd International Conference on Low Temperature Physics (LT-22) - Helsinki, Finl Duration: 4 Aug 1999 → 11 Aug 1999 http://ltl.tkk.fi/LT22/LT22.html |
Funding
This work has been financially supported by the European Space Agency (ESA), the Technology Development Centre of Finland (TEKES), and the Academy of Finland (project 39081).
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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