Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
- Lauri Kilpi*
- , Oili M.E. Ylivaara
- , Antti Vaajoki
- , Jari Malm
- , Sakari Sintonen
- , Marko Tuominen
- , Riikka L. Puurunen
- , Helena Ronkainen
*Corresponding author for this work
- University of Jyväskylä
- Aalto University
- ASM Microchemistry Oy
Research output: Contribution to journal › Article › Scientific › peer-review
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