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Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
Lauri Kilpi (Corresponding Author), Oili M.E. Ylivaara, Antti Vaajoki, Jari Malm, Sakari Sintonen, Marko Tuominen, Riikka L. Puurunen, Helena Ronkainen
Research output: Contribution to journal › Article › Scientific › peer-review
15
Citations
(Scopus)