Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering

S Louring (Corresponding Author), N D Madsen, M Sillassen, A N Berthelsen, B H Christensen, K P Almtoft, Helena Ronkainen, L P Nielsen, J Bøttiger

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.
Original languageEnglish
Pages (from-to)40-48
Number of pages9
JournalSurface and Coatings Technology
Volume245
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Fingerprint

Magnetron sputtering
Nanocomposites
magnetron sputtering
nanocomposites
direct current
coatings
Coatings
Gases
chemical composition
matrices
gases
mechanical properties
Mechanical properties
Nanocrystallites
poisoning
Amorphous carbon
Film growth
Titanium
Deposition rates
Chemical analysis

Keywords

  • Amorphous carbon
  • microstructure
  • nanocrystallite
  • raman spectroscopy
  • x-ray diffraction
  • x-ray photoelectron spectroscopy

Cite this

Louring, S ; Madsen, N D ; Sillassen, M ; Berthelsen, A N ; Christensen, B H ; Almtoft, K P ; Ronkainen, Helena ; Nielsen, L P ; Bøttiger, J. / Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering. In: Surface and Coatings Technology. 2014 ; Vol. 245. pp. 40-48.
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abstract = "Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57{\%}. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20{\%}. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.",
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Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering. / Louring, S (Corresponding Author); Madsen, N D; Sillassen, M; Berthelsen, A N; Christensen, B H; Almtoft, K P; Ronkainen, Helena; Nielsen, L P; Bøttiger, J.

In: Surface and Coatings Technology, Vol. 245, 2014, p. 40-48.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering

AU - Louring, S

AU - Madsen, N D

AU - Sillassen, M

AU - Berthelsen, A N

AU - Christensen, B H

AU - Almtoft, K P

AU - Ronkainen, Helena

AU - Nielsen, L P

AU - Bøttiger, J

PY - 2014

Y1 - 2014

N2 - Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.

AB - Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.

KW - Amorphous carbon

KW - microstructure

KW - nanocrystallite

KW - raman spectroscopy

KW - x-ray diffraction

KW - x-ray photoelectron spectroscopy

U2 - 10.1016/j.surfcoat.2014.02.033

DO - 10.1016/j.surfcoat.2014.02.033

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VL - 245

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JO - Surface and Coatings Technology

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SN - 0257-8972

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