Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering

S Louring (Corresponding Author), N D Madsen, M Sillassen, A N Berthelsen, B H Christensen, K P Almtoft, Helena Ronkainen, L P Nielsen, J Bøttiger

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)

    Abstract

    Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.
    Original languageEnglish
    Pages (from-to)40-48
    Number of pages9
    JournalSurface and Coatings Technology
    Volume245
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Magnetron sputtering
    Nanocomposites
    magnetron sputtering
    nanocomposites
    direct current
    coatings
    Coatings
    Gases
    chemical composition
    matrices
    gases
    mechanical properties
    Mechanical properties
    Nanocrystallites
    poisoning
    Amorphous carbon
    Film growth
    Titanium
    Deposition rates
    Chemical analysis

    Keywords

    • Amorphous carbon
    • microstructure
    • nanocrystallite
    • raman spectroscopy
    • x-ray diffraction
    • x-ray photoelectron spectroscopy

    Cite this

    Louring, S ; Madsen, N D ; Sillassen, M ; Berthelsen, A N ; Christensen, B H ; Almtoft, K P ; Ronkainen, Helena ; Nielsen, L P ; Bøttiger, J. / Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering. In: Surface and Coatings Technology. 2014 ; Vol. 245. pp. 40-48.
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    title = "Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering",
    abstract = "Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57{\%}. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20{\%}. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.",
    keywords = "Amorphous carbon, microstructure, nanocrystallite, raman spectroscopy, x-ray diffraction, x-ray photoelectron spectroscopy",
    author = "S Louring and Madsen, {N D} and M Sillassen and Berthelsen, {A N} and Christensen, {B H} and Almtoft, {K P} and Helena Ronkainen and Nielsen, {L P} and J B{\o}ttiger",
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    Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering. / Louring, S (Corresponding Author); Madsen, N D; Sillassen, M; Berthelsen, A N; Christensen, B H; Almtoft, K P; Ronkainen, Helena; Nielsen, L P; Bøttiger, J.

    In: Surface and Coatings Technology, Vol. 245, 2014, p. 40-48.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Microstructural, mechanical and tribological analysis of nanocomposite Ti-C-N coatings deposited by industrial-scale DC magnetron sputtering

    AU - Louring, S

    AU - Madsen, N D

    AU - Sillassen, M

    AU - Berthelsen, A N

    AU - Christensen, B H

    AU - Almtoft, K P

    AU - Ronkainen, Helena

    AU - Nielsen, L P

    AU - Bøttiger, J

    PY - 2014

    Y1 - 2014

    N2 - Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.

    AB - Nanocomposite coatings consisting of Ti(C,N) nanocrystallites embedded in an amorphous carbon-based matrix were studied. The coatings were deposited by reactive DC magnetron sputtering in an industrial-scale deposition system. The microstructure and mechanical properties of the films were studied as a function of the N2-fraction in the sputter gas and the deposition temperature. It was suggested that the chemical compositions and deposition rates were governed by a complex interplay between target poisoning and chemical sputtering of the growing film. From the chemical compositions, the content of amorphous matrix was estimated to be up to 57%. It was found that the highest amount of crystalline material was obtained at low N2-fractions in the sputter gas, which coincided with the highest concentration of titanium in the coatings. An overall dependence of the hardness and the elastic modulus on the estimated content of amorphous phase was found for amorphous phase contents exceeding about 20%. It was suggested that the mechanical properties were mainly controlled by the amorphous matrix. A pin-on-disc test revealed that a higher N2-fraction in the sputter gas resulted in a higher wear rate, whereas similar friction coefficients were obtained independent on the N2-fraction.

    KW - Amorphous carbon

    KW - microstructure

    KW - nanocrystallite

    KW - raman spectroscopy

    KW - x-ray diffraction

    KW - x-ray photoelectron spectroscopy

    U2 - 10.1016/j.surfcoat.2014.02.033

    DO - 10.1016/j.surfcoat.2014.02.033

    M3 - Article

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    SP - 40

    EP - 48

    JO - Surface and Coatings Technology

    JF - Surface and Coatings Technology

    SN - 0257-8972

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