@inproceedings{cfd4064d66ba4e19ac39616788160efb,
title = "Microvia fill process boundary control",
abstract = "This paper presents an exponentially stabilizing boundary control for the microvia fill process. The control accounts for the mass balance of the copper ions in the electrolyte and for the surface mass balance of the deposition-blocking additives, both modeled with a diffusion mass transfer model in a shape changing domain. With simulations based on real-world data, it is shown that by applying the control, the microvia fill process can be speeded up (in the example case by ca. 15%) without endangering product output quality",
keywords = "spatially distributed systems, monitoring, manufacturing, modeling",
author = "R. Tenno and Antti Pohjoranta",
year = "2014",
doi = "10.3182/20140824-6-ZA-1003.00947",
language = "English",
isbn = "978-3-902823-62-5",
series = "IFAC Proceedings Volumes",
publisher = "Elsevier",
number = "3",
pages = "10439--10444",
editor = "Edward Boje and Xiaohua Xia",
booktitle = "19th IFAC World Congress",
address = "Netherlands",
note = "19th IFAC World Congress, IFAC WC 2014, IFAC WC 2014 ; Conference date: 24-08-2014 Through 29-08-2014",
}