Microvia fill process model and control

Antti Pohjoranta (Corresponding Author), R Tenno

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)

    Abstract

    This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model
    Original languageEnglish
    Pages (from-to)1414-1440
    Number of pages26
    JournalJournal of Mathematical Chemistry
    Volume52
    Issue number5
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Deposition control
    • microvia fill control
    • microvia fill modeling
    • microvia filling

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