Microvia fill process model and control

Antti Pohjoranta (Corresponding Author), R Tenno

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Abstract

This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model
Original languageEnglish
Pages (from-to)1414-1440
Number of pages26
JournalJournal of Mathematical Chemistry
Volume52
Issue number5
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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Process Control
Process Model
Model-based Control
Control Algorithm
Modeling
Error Control
Measurement Error
Lagrange
Stochastic Model
Uncertainty
Stochastic models
Measurement errors
Arbitrary
Model

Keywords

  • Deposition control
  • microvia fill control
  • microvia fill modeling
  • microvia filling

Cite this

Pohjoranta, Antti ; Tenno, R. / Microvia fill process model and control. In: Journal of Mathematical Chemistry. 2014 ; Vol. 52, No. 5. pp. 1414-1440.
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Microvia fill process model and control. / Pohjoranta, Antti (Corresponding Author); Tenno, R.

In: Journal of Mathematical Chemistry, Vol. 52, No. 5, 2014, p. 1414-1440.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Microvia fill process model and control

AU - Pohjoranta, Antti

AU - Tenno, R

PY - 2014

Y1 - 2014

N2 - This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model

AB - This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model

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KW - microvia fill control

KW - microvia fill modeling

KW - microvia filling

U2 - 10.1007/s10910-014-0320-6

DO - 10.1007/s10910-014-0320-6

M3 - Article

VL - 52

SP - 1414

EP - 1440

JO - Journal of Mathematical Chemistry

JF - Journal of Mathematical Chemistry

SN - 0259-9791

IS - 5

ER -