Abstract
This paper presents an overview of the modeling and model
based control of the microvia fill process. A detailed,
general-purpose microvia fill model that utilizes the
arbitrary Lagrange-Eulerian method for shape change
modeling is presented first. Modeling results are
presented and compared with the measured data. Then a
simplified model of the process is presented followed by
a model based control algorithm being developed based on
the simplified stochastic model with typical
uncertainties induced by unmodelled phenomena and
measurement error. The developed control algorithm is
analyzed in terms of possible control errors and applied
to control the firstly presented microvia fill process
model
| Original language | English |
|---|---|
| Pages (from-to) | 1414-1440 |
| Number of pages | 26 |
| Journal | Journal of Mathematical Chemistry |
| Volume | 52 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- Deposition control
- microvia fill control
- microvia fill modeling
- microvia filling