Microvia fill process model and control

Antti Pohjoranta (Corresponding Author), R Tenno

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)

    Abstract

    This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model
    Original languageEnglish
    Pages (from-to)1414-1440
    Number of pages26
    JournalJournal of Mathematical Chemistry
    Volume52
    Issue number5
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Process Control
    Process Model
    Model-based Control
    Control Algorithm
    Modeling
    Error Control
    Measurement Error
    Lagrange
    Stochastic Model
    Uncertainty
    Stochastic models
    Measurement errors
    Arbitrary
    Model

    Keywords

    • Deposition control
    • microvia fill control
    • microvia fill modeling
    • microvia filling

    Cite this

    Pohjoranta, Antti ; Tenno, R. / Microvia fill process model and control. In: Journal of Mathematical Chemistry. 2014 ; Vol. 52, No. 5. pp. 1414-1440.
    @article{ab4436354a5b49449172d5951e86ef0f,
    title = "Microvia fill process model and control",
    abstract = "This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model",
    keywords = "Deposition control, microvia fill control, microvia fill modeling, microvia filling",
    author = "Antti Pohjoranta and R Tenno",
    year = "2014",
    doi = "10.1007/s10910-014-0320-6",
    language = "English",
    volume = "52",
    pages = "1414--1440",
    journal = "Journal of Mathematical Chemistry",
    issn = "0259-9791",
    publisher = "Springer",
    number = "5",

    }

    Microvia fill process model and control. / Pohjoranta, Antti (Corresponding Author); Tenno, R.

    In: Journal of Mathematical Chemistry, Vol. 52, No. 5, 2014, p. 1414-1440.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Microvia fill process model and control

    AU - Pohjoranta, Antti

    AU - Tenno, R

    PY - 2014

    Y1 - 2014

    N2 - This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model

    AB - This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange-Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties induced by unmodelled phenomena and measurement error. The developed control algorithm is analyzed in terms of possible control errors and applied to control the firstly presented microvia fill process model

    KW - Deposition control

    KW - microvia fill control

    KW - microvia fill modeling

    KW - microvia filling

    U2 - 10.1007/s10910-014-0320-6

    DO - 10.1007/s10910-014-0320-6

    M3 - Article

    VL - 52

    SP - 1414

    EP - 1440

    JO - Journal of Mathematical Chemistry

    JF - Journal of Mathematical Chemistry

    SN - 0259-9791

    IS - 5

    ER -