Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

Tauno Vähä-Heikkilä, Mari Ylönen, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.
Original languageEnglish
Title of host publicationProceedings of the Mediterranean Microwave Symposium 2006
Subtitle of host publicationGenova, Italy, 18-21 Sept. 2006
Pages1798-1801
Publication statusPublished - 2006
MoE publication typeNot Eligible

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Keywords

  • RF MEMS
  • MEMS
  • CMOS
  • millimeter wave
  • switched capacitor
  • varactor

Cite this

Vähä-Heikkilä, T., Ylönen, M., & Kattelus, H. (2006). Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication. In Proceedings of the Mediterranean Microwave Symposium 2006: Genova, Italy, 18-21 Sept. 2006 (pp. 1798-1801)