Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

Tauno Vähä-Heikkilä; Mari Ylönen; Hannu Kattelus

Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

Tauno Vähä-Heikkilä, Mari Ylönen, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.

Original language	English
Title of host publication	Proceedings of the Mediterranean Microwave Symposium 2006
Subtitle of host publication	Genova, Italy, 18-21 Sept. 2006
Pages	1798-1801
Publication status	Published - 2006
MoE publication type	Not Eligible

Keywords

RF MEMS
MEMS
CMOS
millimeter wave
switched capacitor
varactor

Cite this

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title = "Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication",

abstract = "CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.",

keywords = "RF MEMS, MEMS, CMOS, millimeter wave, switched capacitor, varactor",

author = "Tauno V{\"a}h{\"a}-Heikkil{\"a} and Mari Yl{\"o}nen and Hannu Kattelus",

note = "No ISBN/ISSN found for the proceedings",

year = "2006",

language = "English",

pages = "1798--1801",

booktitle = "Proceedings of the Mediterranean Microwave Symposium 2006",

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Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication. / Vähä-Heikkilä, Tauno; Ylönen, Mari; Kattelus, Hannu.
Proceedings of the Mediterranean Microwave Symposium 2006: Genova, Italy, 18-21 Sept. 2006. 2006. p. 1798-1801.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

AU - Vähä-Heikkilä, Tauno

AU - Ylönen, Mari

AU - Kattelus, Hannu

N1 - No ISBN/ISSN found for the proceedings

PY - 2006

Y1 - 2006

N2 - CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.

AB - CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.

KW - RF MEMS

KW - MEMS

KW - CMOS

KW - millimeter wave

KW - switched capacitor

KW - varactor

M3 - Conference article in proceedings

SP - 1798

EP - 1801

BT - Proceedings of the Mediterranean Microwave Symposium 2006

ER -

Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

Abstract

Keywords

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Cite this