Microwave and millimeter wave MEMS components and circuits based on CMOS compatible fabrication

Tauno Vähä-Heikkilä, Mari Ylönen, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.
    Original languageEnglish
    Title of host publicationProceedings of the Mediterranean Microwave Symposium 2006
    Subtitle of host publicationGenova, Italy, 18-21 Sept. 2006
    Pages1798-1801
    Publication statusPublished - 2006
    MoE publication typeNot Eligible

    Keywords

    • RF MEMS
    • MEMS
    • CMOS
    • millimeter wave
    • switched capacitor
    • varactor

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