CMOS compatible fabrication process has been used for realizing capacitive MEMS components and circuits for microwave and millimeter wave frequencies. Circuits from 1 GHz to 200 GHz can be realized with one and the same process. Measured results show that circuits can be designed accurately to have good wideband matching as well as reliable functioning.
|Title of host publication||Proceedings of the Mediterranean Microwave Symposium 2006|
|Subtitle of host publication||Genova, Italy, 18-21 Sept. 2006|
|Publication status||Published - 2006|
|MoE publication type||Not Eligible|
- RF MEMS
- millimeter wave
- switched capacitor