Abstract
| Original language | English |
|---|---|
| Title of host publication | Advanced Materials and Technologies for Micro/Nano-Devices |
| Editors | Evgeni Gusev, Eric Garfunkel, Arthur Dideikin |
| Place of Publication | The Netherlands |
| Publisher | Springer |
| Pages | 75-87 |
| ISBN (Electronic) | 978-90-481-3807-4 |
| ISBN (Print) | 978-90-481-3805-0, 978-90-481-3806-7 |
| DOIs | |
| Publication status | Published - 2010 |
| MoE publication type | A3 Part of a book or another research book |
| Event | Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 - Duration: 1 Jan 2010 → … |
Conference
| Conference | Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 |
|---|---|
| Period | 1/01/10 → … |
Fingerprint
Keywords
- Filter
- receiver
- antenna
- micromachining
- membrane
Cite this
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Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. / Mueller, Alexandru; Neculoiu, Dan; Konstantinidis, George; Vähä-Heikkilä, Tauno.
Advanced Materials and Technologies for Micro/Nano-Devices. ed. / Evgeni Gusev; Eric Garfunkel; Arthur Dideikin. The Netherlands : Springer, 2010. p. 75-87.Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
TY - CHAP
T1 - Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors
AU - Mueller, Alexandru
AU - Neculoiu, Dan
AU - Konstantinidis, George
AU - Vähä-Heikkilä, Tauno
PY - 2010
Y1 - 2010
N2 - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.
AB - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.
KW - Filter
KW - receiver
KW - antenna
KW - micromachining
KW - membrane
U2 - 10.1007/978-90-481-3807-4_6
DO - 10.1007/978-90-481-3807-4_6
M3 - Chapter or book article
SN - 978-90-481-3805-0
SN - 978-90-481-3806-7
SP - 75
EP - 87
BT - Advanced Materials and Technologies for Micro/Nano-Devices
A2 - Gusev, Evgeni
A2 - Garfunkel, Eric
A2 - Dideikin, Arthur
PB - Springer
CY - The Netherlands
ER -