Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Müller (Corresponding author), Dan Neculoiu, George Konstantinidis, Tauno Vähä-Heikkilä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.
    Original languageEnglish
    Title of host publicationAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
    EditorsEvgeni Gusev, Eric Garfunkel, Arthur Dideikin
    Place of PublicationDordrecht
    PublisherSpringer
    Pages75-87
    ISBN (Electronic)978-90-481-3807-4
    ISBN (Print)978-90-481-3805-0, 978-90-481-3806-7
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventAdvanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators - St. Petersburg, Russian Federation
    Duration: 29 Jun 200930 Jun 2009

    Publication series

    SeriesNATO Science for Peace and Security Series B: Physics and Biophysics
    ISSN1874-6500

    Conference

    ConferenceAdvanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators
    Country/TerritoryRussian Federation
    CitySt. Petersburg
    Period29/06/0930/06/09

    Keywords

    • Filter
    • receiver
    • antenna
    • micromachining
    • membrane

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