Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Mueller, Dan Neculoiu, George Konstantinidis, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

Abstract

A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.
Original languageEnglish
Title of host publicationAdvanced Materials and Technologies for Micro/Nano-Devices
EditorsEvgeni Gusev, Eric Garfunkel, Arthur Dideikin
Place of PublicationThe Netherlands
PublisherSpringer
Pages75-87
ISBN (Electronic)978-90-481-3807-4
ISBN (Print)978-90-481-3805-0, 978-90-481-3806-7
DOIs
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book
EventAdvanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 -
Duration: 1 Jan 2010 → …

Conference

ConferenceAdvanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009
Period1/01/10 → …

Fingerprint

Millimeter wave devices
Micromachining
Microwaves
Membranes
Millimeter waves
Networks (circuits)
Antennas
Submillimeter waves
Bandpass filters
Diodes
III-V semiconductors

Keywords

  • Filter
  • receiver
  • antenna
  • micromachining
  • membrane

Cite this

Mueller, A., Neculoiu, D., Konstantinidis, G., & Vähä-Heikkilä, T. (2010). Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. In E. Gusev, E. Garfunkel, & A. Dideikin (Eds.), Advanced Materials and Technologies for Micro/Nano-Devices (pp. 75-87). The Netherlands: Springer. https://doi.org/10.1007/978-90-481-3807-4_6
Mueller, Alexandru ; Neculoiu, Dan ; Konstantinidis, George ; Vähä-Heikkilä, Tauno. / Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. Advanced Materials and Technologies for Micro/Nano-Devices. editor / Evgeni Gusev ; Eric Garfunkel ; Arthur Dideikin. The Netherlands : Springer, 2010. pp. 75-87
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Mueller, A, Neculoiu, D, Konstantinidis, G & Vähä-Heikkilä, T 2010, Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. in E Gusev, E Garfunkel & A Dideikin (eds), Advanced Materials and Technologies for Micro/Nano-Devices. Springer, The Netherlands, pp. 75-87, Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009, 1/01/10. https://doi.org/10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. / Mueller, Alexandru; Neculoiu, Dan; Konstantinidis, George; Vähä-Heikkilä, Tauno.

Advanced Materials and Technologies for Micro/Nano-Devices. ed. / Evgeni Gusev; Eric Garfunkel; Arthur Dideikin. The Netherlands : Springer, 2010. p. 75-87.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

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T1 - Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

AU - Mueller, Alexandru

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AU - Konstantinidis, George

AU - Vähä-Heikkilä, Tauno

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N2 - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

AB - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

KW - Filter

KW - receiver

KW - antenna

KW - micromachining

KW - membrane

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Mueller A, Neculoiu D, Konstantinidis G, Vähä-Heikkilä T. Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. In Gusev E, Garfunkel E, Dideikin A, editors, Advanced Materials and Technologies for Micro/Nano-Devices. The Netherlands: Springer. 2010. p. 75-87 https://doi.org/10.1007/978-90-481-3807-4_6