@inproceedings{bcd1f7130bba4184b82321262d1ec0f8,
title = "Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors",
abstract = "A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.",
keywords = "Filter, receiver, antenna, micromachining, membrane",
author = "Alexandru M{\"u}ller and Dan Neculoiu and George Konstantinidis and Tauno V{\"a}h{\"a}-Heikkil{\"a}",
year = "2010",
doi = "10.1007/978-90-481-3807-4_6",
language = "English",
isbn = "978-90-481-3805-0",
series = "NATO Science for Peace and Security Series B: Physics and Biophysics",
publisher = "Springer",
pages = "75--87",
editor = "Evgeni Gusev and Eric Garfunkel and Arthur Dideikin",
booktitle = "Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators",
address = "Germany",
note = "Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators ; Conference date: 29-06-2009 Through 30-06-2009",
}
