Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Mueller; Dan Neculoiu; George Konstantinidis; Tauno Vähä-Heikkilä

doi:10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Mueller, Dan Neculoiu, George Konstantinidis, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

Abstract

A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

Original language	English
Title of host publication	Advanced Materials and Technologies for Micro/Nano-Devices
Editors	Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
Place of Publication	The Netherlands
Publisher	Springer
Pages	75-87
ISBN (Electronic)	978-90-481-3807-4
ISBN (Print)	978-90-481-3805-0, 978-90-481-3806-7
DOIs	https://doi.org/10.1007/978-90-481-3807-4_6
Publication status	Published - 2010
MoE publication type	A3 Part of a book or another research book
Event	Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 - Duration: 1 Jan 2010 → …

Conference

Conference	Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009
Period	1/01/10 → …

Keywords

Filter
receiver
antenna
micromachining
membrane

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Cite this

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title = "Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors",

abstract = "A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.",

keywords = "Filter, receiver, antenna, micromachining, membrane",

author = "Alexandru Mueller and Dan Neculoiu and George Konstantinidis and Tauno V{\"a}h{\"a}-Heikkil{\"a}",

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Mueller, A, Neculoiu, D, Konstantinidis, G & Vähä-Heikkilä, T 2010, Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. in E Gusev, E Garfunkel & A Dideikin (eds), Advanced Materials and Technologies for Micro/Nano-Devices. Springer, The Netherlands, pp. 75-87, Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009, 1/01/10. https://doi.org/10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. / Mueller, Alexandru; Neculoiu, Dan; Konstantinidis, George; Vähä-Heikkilä, Tauno.

Advanced Materials and Technologies for Micro/Nano-Devices. ed. / Evgeni Gusev; Eric Garfunkel; Arthur Dideikin. The Netherlands : Springer, 2010. p. 75-87.

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

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T1 - Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

AU - Mueller, Alexandru

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N2 - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

AB - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

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KW - antenna

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KW - membrane

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