Abstract
A review of recent developments of membrane supported
millimeter wave circuits based on GaAs micromachining,
performed in authors' labs. is presented. Coupled line
band pass filters for 35 GHz, Yagi-Uda antennae for 60
GHz having as support a 2 µm thin GaAs membrane are
presented. Also the manufacturing direct, video-type
receiver module having the Yagi-Uda antenna and Schottky
diode monolithic integrated on the same GaAs membrane is
presented. The very good results obtained on the
measurements of these circuits have demonstrated the high
capabilities of GaAs micromachining in manufacturing of
high performances millimeter wave circuits and the
potential advantage of these technologies for the
sub-millimeter wave frequency range were other solutions
are not available.
Original language | English |
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Title of host publication | Advanced Materials and Technologies for Micro/Nano-Devices |
Editors | Evgeni Gusev, Eric Garfunkel, Arthur Dideikin |
Place of Publication | The Netherlands |
Publisher | Springer |
Pages | 75-87 |
ISBN (Electronic) | 978-90-481-3807-4 |
ISBN (Print) | 978-90-481-3805-0, 978-90-481-3806-7 |
DOIs | |
Publication status | Published - 2010 |
MoE publication type | A3 Part of a book or another research book |
Event | Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 - Duration: 1 Jan 2010 → … |
Conference
Conference | Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators. St. Petersburg, Russia, 29 - 30 June 2009 |
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Period | 1/01/10 → … |
Keywords
- Filter
- receiver
- antenna
- micromachining
- membrane