Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Müller; Dan Neculoiu; George Konstantinidis; Tauno Vähä-Heikkilä

doi:10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Alexandru Müller^*
, Dan Neculoiu
, George Konstantinidis
, Tauno Vähä-Heikkilä

^*Corresponding author for this work

National Institute for Research and Development in Microtechnologies
Universitatea Politehnica din București

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

Original language	English
Title of host publication	Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Editors	Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
Place of Publication	Dordrecht
Publisher	Springer
Pages	75-87
ISBN (Electronic)	978-90-481-3807-4
ISBN (Print)	978-90-481-3805-0, 978-90-481-3806-7
DOIs	https://doi.org/10.1007/978-90-481-3807-4_6
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators - St. Petersburg, Russian Federation Duration: 29 Jun 2009 → 30 Jun 2009

Publication series

Series	NATO Science for Peace and Security Series B: Physics and Biophysics
ISSN	1874-6500

Conference

Conference	Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators
Country/Territory	Russian Federation
City	St. Petersburg
Period	29/06/09 → 30/06/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Filter
receiver
antenna
micromachining
membrane

Access to Document

10.1007/978-90-481-3807-4_6

Cite this

Müller, Alexandru ; Neculoiu, Dan ; Konstantinidis, George et al. / Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. editor / Evgeni Gusev ; Eric Garfunkel ; Arthur Dideikin. Dordrecht : Springer, 2010. pp. 75-87 (NATO Science for Peace and Security Series B: Physics and Biophysics).

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title = "Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors",

abstract = "A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.",

keywords = "Filter, receiver, antenna, micromachining, membrane",

author = "Alexandru M{\"u}ller and Dan Neculoiu and George Konstantinidis and Tauno V{\"a}h{\"a}-Heikkil{\"a}",

year = "2010",

doi = "10.1007/978-90-481-3807-4\_6",

language = "English",

isbn = "978-90-481-3805-0",

series = "NATO Science for Peace and Security Series B: Physics and Biophysics",

pages = "75--87",

editor = "Evgeni Gusev and Eric Garfunkel and Arthur Dideikin",

booktitle = "Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators",

publisher = "Springer",

address = "Germany",

note = "Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators ; Conference date: 29-06-2009 Through 30-06-2009",

}

Müller, A, Neculoiu, D, Konstantinidis, G & Vähä-Heikkilä, T 2010, Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. in E Gusev, E Garfunkel & A Dideikin (eds), Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Springer, Dordrecht, NATO Science for Peace and Security Series B: Physics and Biophysics, pp. 75-87, Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators, St. Petersburg, Russian Federation, 29/06/09. https://doi.org/10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. / Müller, Alexandru; Neculoiu, Dan; Konstantinidis, George et al.
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. ed. / Evgeni Gusev; Eric Garfunkel; Arthur Dideikin. Dordrecht: Springer, 2010. p. 75-87 (NATO Science for Peace and Security Series B: Physics and Biophysics).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

AU - Müller, Alexandru

AU - Neculoiu, Dan

AU - Konstantinidis, George

AU - Vähä-Heikkilä, Tauno

PY - 2010

Y1 - 2010

N2 - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

AB - A review of recent developments of membrane supported millimeter wave circuits based on GaAs micromachining, performed in authors' labs. is presented. Coupled line band pass filters for 35 GHz, Yagi-Uda antennae for 60 GHz having as support a 2 µm thin GaAs membrane are presented. Also the manufacturing direct, video-type receiver module having the Yagi-Uda antenna and Schottky diode monolithic integrated on the same GaAs membrane is presented. The very good results obtained on the measurements of these circuits have demonstrated the high capabilities of GaAs micromachining in manufacturing of high performances millimeter wave circuits and the potential advantage of these technologies for the sub-millimeter wave frequency range were other solutions are not available.

KW - Filter

KW - receiver

KW - antenna

KW - micromachining

KW - membrane

U2 - 10.1007/978-90-481-3807-4_6

DO - 10.1007/978-90-481-3807-4_6

M3 - Conference article in proceedings

SN - 978-90-481-3805-0

SN - 978-90-481-3806-7

T3 - NATO Science for Peace and Security Series B: Physics and Biophysics

SP - 75

EP - 87

BT - Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

A2 - Gusev, Evgeni

A2 - Garfunkel, Eric

A2 - Dideikin, Arthur

PB - Springer

CY - Dordrecht

T2 - Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-devices, sensors and actuators

Y2 - 29 June 2009 through 30 June 2009

ER -

Müller A, Neculoiu D, Konstantinidis G, Vähä-Heikkilä T. Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors. In Gusev E, Garfunkel E, Dideikin A, editors, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Dordrecht: Springer. 2010. p. 75-87. (NATO Science for Peace and Security Series B: Physics and Biophysics). doi: 10.1007/978-90-481-3807-4_6

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Abstract

Publication series

Conference

UN SDGs

Keywords

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