Abstract
The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.
EP2480867 A1 20120801 EP20100818467 20100924
EP2480867 A4 20180103 EP20100818467 20100924
FI20095976 A0 20090924 FI20090005976 20090924
JP2013506154 T2 20130221 JP20120530300T 20100924
JP5685257 B2 20150318 JP20120530300T 20100924
US2012181647 AA 20120719 US20100498143 20100924
US8995044 BB 20150331 US20100498143 20100924
WO11036346 A1 20110331 WO2010FI50739 20100924
Link to current patent family on right
| Original language | English |
|---|---|
| Patent number | US2012181647 |
| IPC | H01L 31/ 18 A I |
| Priority date | 24/09/10 |
| Publication status | Published - 19 Jul 2012 |
| MoE publication type | H1 Granted patent |