Migration kinetics of ion-implanted beryllium in ZnO and GaN

Otso Koskelo; Ulli Köster; Filip Tuomisto; Kerttuli Helariutta; Markku Sopanen; Sami Suihkonen; Olli Svensk; Jyrki Räisänen

doi:10.1088/0031-8949/88/03/035603

Migration kinetics of ion-implanted beryllium in ZnO and GaN

Otso Koskelo, Ulli Köster, Filip Tuomisto, Kerttuli Helariutta, Markku Sopanen, Sami Suihkonen, Olli Svensk, Jyrki Räisänen

Not published at VTT

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	035603
Number of pages	5
Journal	Physica Scripta
Volume	88
Issue number	3
DOIs	https://doi.org/10.1088/0031-8949/88/03/035603
Publication status	Published - 22 Aug 2013
MoE publication type	A1 Journal article-refereed

Access to Document

10.1088/0031-8949/88/03/035603

Cite this

@article{54b3f9a02c3a4311851db603e466b551,

title = "Migration kinetics of ion-implanted beryllium in ZnO and GaN",

author = "Otso Koskelo and Ulli K{\"o}ster and Filip Tuomisto and Kerttuli Helariutta and Markku Sopanen and Sami Suihkonen and Olli Svensk and Jyrki R{\"a}is{\"a}nen",

note = "M1 - 035603",

year = "2013",

month = aug,

day = "22",

doi = "10.1088/0031-8949/88/03/035603",

language = "English",

volume = "88",

pages = "035603",

journal = "Physica Scripta",

issn = "0031-8949",

publisher = "Institute of Physics IOP",

number = "3",

}

TY - JOUR

T1 - Migration kinetics of ion-implanted beryllium in ZnO and GaN

AU - Koskelo, Otso

AU - Köster, Ulli

AU - Tuomisto, Filip

AU - Helariutta, Kerttuli

AU - Sopanen, Markku

AU - Suihkonen, Sami

AU - Svensk, Olli

AU - Räisänen, Jyrki

N1 - M1 - 035603

PY - 2013/8/22

Y1 - 2013/8/22

U2 - 10.1088/0031-8949/88/03/035603

DO - 10.1088/0031-8949/88/03/035603

M3 - Article

SN - 0031-8949

VL - 88

SP - 035603

JO - Physica Scripta

JF - Physica Scripta

IS - 3

ER -