Migration kinetics of ion-implanted beryllium in ZnO and GaN

Otso Koskelo; Ulli Köster; Filip Tuomisto; Kerttuli Helariutta; Markku Sopanen; Sami Suihkonen; Olli Svensk; Jyrki Räisänen

doi:10.1088/0031-8949/88/03/035603

Migration kinetics of ion-implanted beryllium in ZnO and GaN

Otso Koskelo
, Ulli Köster
, Filip Tuomisto
, Kerttuli Helariutta
, Markku Sopanen
, Sami Suihkonen
, Olli Svensk
, Jyrki Räisänen

Not published at VTT

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	035603
Number of pages	5
Journal	Physica Scripta
Volume	88
Issue number	3
DOIs	https://doi.org/10.1088/0031-8949/88/03/035603
Publication status	Published - 22 Aug 2013
MoE publication type	A1 Journal article-refereed

Access to Document

10.1088/0031-8949/88/03/035603

Cite this

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author = "Otso Koskelo and Ulli K{\"o}ster and Filip Tuomisto and Kerttuli Helariutta and Markku Sopanen and Sami Suihkonen and Olli Svensk and Jyrki R{\"a}is{\"a}nen",

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AU - Koskelo, Otso

AU - Köster, Ulli

AU - Tuomisto, Filip

AU - Helariutta, Kerttuli

AU - Sopanen, Markku

AU - Suihkonen, Sami

AU - Svensk, Olli

AU - Räisänen, Jyrki

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PY - 2013/8/22

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U2 - 10.1088/0031-8949/88/03/035603

DO - 10.1088/0031-8949/88/03/035603

M3 - Article

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JO - Physica Scripta

JF - Physica Scripta

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