MIKES' facility for calibration of commercial laser interferometers

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    1 Citation (Scopus)

    Abstract

    Length and displacement measurements in the manufacturing industry and in calibration laboratories rely on the accurate and traceable operation of laser interferometers. In this paper, we shortly describe the calibration service for commercial laser interferometers at MIKES. The uncertainty of a typical uncalibrated laser interferometer is decreased by calibration from few micrometers level to hundreds of nanometers level per 1 m distance.

    Original languageEnglish
    Title of host publicationEUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
    PublisherEuspen
    Pages205-208
    Number of pages4
    Publication statusPublished - 1 Jan 2005
    MoE publication typeA4 Article in a conference publication
    Event5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France
    Duration: 8 May 200511 May 2005

    Conference

    Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
    CountryFrance
    CityMontpellier
    Period8/05/0511/05/05

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