Abstract
Length and displacement measurements in the manufacturing industry and in calibration laboratories rely on the accurate and traceable operation of laser interferometers. In this paper, we shortly describe the calibration service for commercial laser interferometers at MIKES. The uncertainty of a typical uncalibrated laser interferometer is decreased by calibration from few micrometers level to hundreds of nanometers level per 1 m distance.
Original language | English |
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Title of host publication | EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology |
Publisher | Euspen |
Pages | 205-208 |
Number of pages | 4 |
Publication status | Published - 1 Jan 2005 |
MoE publication type | A4 Article in a conference publication |
Event | 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France Duration: 8 May 2005 → 11 May 2005 |
Conference
Conference | 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 |
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Country/Territory | France |
City | Montpellier |
Period | 8/05/05 → 11/05/05 |