MIKES' facility for calibration of commercial laser interferometers

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

Length and displacement measurements in the manufacturing industry and in calibration laboratories rely on the accurate and traceable operation of laser interferometers. In this paper, we shortly describe the calibration service for commercial laser interferometers at MIKES. The uncertainty of a typical uncalibrated laser interferometer is decreased by calibration from few micrometers level to hundreds of nanometers level per 1 m distance.

Original languageEnglish
Title of host publicationEUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
PublisherEuspen
Pages205-208
Number of pages4
Publication statusPublished - 1 Jan 2005
MoE publication typeA4 Article in a conference publication
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France
Duration: 8 May 200511 May 2005

Conference

Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
CountryFrance
CityMontpellier
Period8/05/0511/05/05

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