MIKES' primary phase stepping gauge block interferometer

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3 Citations (Scopus)

Abstract

MIKES' modernized phase stepping interferometer for gauge block calibration (PSIGB) will be described. The instrument is based on the well-regarded NPL-TESA gauge block interferometer from 1994. The decision to upgrade the instrument resulted from several components, such as the PC and charge-coupled device (CCD) camera, having reached the end of their lifetime. In this paper modernized components, measurement method and analysis will be explained. The lasers are coupled to the instrument using single mode fiber. The instrument uses phase stepping generated by an added optical window on a controllable rotatory table in the reference arm with a recently developed nine-position phase stepping algorithm. Unwrapping is done with a robust path following algorithm. Procedures for adjusting the interferometer are explained. Determination and elimination of wavefront error, coherent noise and analysis of their influence on the results is described. Flatness and variation in length are also important parameters of gauge blocks to be characterized, and the corresponding analysis method is clarified. Uncertainty analysis for the central length, flatness and variation in length is also described. The results are compared against those of the old hardware and software. The standard uncertainty for central length measurement is u = [(9.5?nm)2 + (121 * 10-9?L)2]½, where L is measured length.
Original languageEnglish
Article number084009
Number of pages9
JournalMeasurement Science and Technology
Volume26
Issue number8
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

Fingerprint

Gage blocks
Interferometer
Interferometers
Gauge
interferometers
flatness
Flatness
Uncertainty analysis
Path-following Algorithm
Wavefronts
Single mode fibers
CCD cameras
Charge-coupled Device
Uncertainty Analysis
Robust Algorithm
Single-mode Fiber
elimination
charge coupled devices
hardware
Wave Front

Keywords

  • gauge block
  • interferometer
  • phase stepping
  • wavefront error
  • length
  • flatness

Cite this

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title = "MIKES' primary phase stepping gauge block interferometer",
abstract = "MIKES' modernized phase stepping interferometer for gauge block calibration (PSIGB) will be described. The instrument is based on the well-regarded NPL-TESA gauge block interferometer from 1994. The decision to upgrade the instrument resulted from several components, such as the PC and charge-coupled device (CCD) camera, having reached the end of their lifetime. In this paper modernized components, measurement method and analysis will be explained. The lasers are coupled to the instrument using single mode fiber. The instrument uses phase stepping generated by an added optical window on a controllable rotatory table in the reference arm with a recently developed nine-position phase stepping algorithm. Unwrapping is done with a robust path following algorithm. Procedures for adjusting the interferometer are explained. Determination and elimination of wavefront error, coherent noise and analysis of their influence on the results is described. Flatness and variation in length are also important parameters of gauge blocks to be characterized, and the corresponding analysis method is clarified. Uncertainty analysis for the central length, flatness and variation in length is also described. The results are compared against those of the old hardware and software. The standard uncertainty for central length measurement is u = [(9.5?nm)2 + (121 * 10-9?L)2]½, where L is measured length.",
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author = "Ville Byman and Antti Lassila",
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language = "English",
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MIKES' primary phase stepping gauge block interferometer. / Byman, Ville; Lassila, Antti.

In: Measurement Science and Technology, Vol. 26, No. 8, 084009, 2015.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - MIKES' primary phase stepping gauge block interferometer

AU - Byman, Ville

AU - Lassila, Antti

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AB - MIKES' modernized phase stepping interferometer for gauge block calibration (PSIGB) will be described. The instrument is based on the well-regarded NPL-TESA gauge block interferometer from 1994. The decision to upgrade the instrument resulted from several components, such as the PC and charge-coupled device (CCD) camera, having reached the end of their lifetime. In this paper modernized components, measurement method and analysis will be explained. The lasers are coupled to the instrument using single mode fiber. The instrument uses phase stepping generated by an added optical window on a controllable rotatory table in the reference arm with a recently developed nine-position phase stepping algorithm. Unwrapping is done with a robust path following algorithm. Procedures for adjusting the interferometer are explained. Determination and elimination of wavefront error, coherent noise and analysis of their influence on the results is described. Flatness and variation in length are also important parameters of gauge blocks to be characterized, and the corresponding analysis method is clarified. Uncertainty analysis for the central length, flatness and variation in length is also described. The results are compared against those of the old hardware and software. The standard uncertainty for central length measurement is u = [(9.5?nm)2 + (121 * 10-9?L)2]½, where L is measured length.

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KW - flatness

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