| Translated title of the contribution | Microsystems for microchips |
|---|---|
| Original language | Finnish |
| Pages (from-to) | 395-399 |
| Journal | Kemia-Kemi |
| Volume | 26 |
| Issue number | 5 |
| Publication status | Published - 1999 |
| MoE publication type | D1 Article in a trade journal |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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