Miniature Michelson interferometer based on an LTCC platform

Kimmo Keränen, Heikkinen Mikko, Niemelä Karri, Veli Heikkinen, Pentti Karioja

Research output: Contribution to conferenceConference PosterScientific

Abstract

A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.
Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
EventNordic Optics Days 2006: Northern Optices 2006 - Bergen, Norway
Duration: 14 Jun 200616 Jun 2006

Conference

ConferenceNordic Optics Days 2006
CountryNorway
CityBergen
Period14/06/0616/06/06

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Keywords

  • miniature Michelson interferometer
  • LTCC platform
  • high precision displacement measurement

Cite this

Keränen, K., Mikko, H., Karri, N., Heikkinen, V., & Karioja, P. (2006). Miniature Michelson interferometer based on an LTCC platform. Poster session presented at Nordic Optics Days 2006, Bergen, Norway.