Miniature Michelson interferometer based on an LTCC platform

Kimmo Keränen, Heikkinen Mikko, Niemelä Karri, Veli Heikkinen, Pentti Karioja

Research output: Contribution to conferenceConference PosterScientific


A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.
Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
EventNordic Optics Days 2006: Northern Optices 2006 - Bergen, Norway
Duration: 14 Jun 200616 Jun 2006


ConferenceNordic Optics Days 2006


  • miniature Michelson interferometer
  • LTCC platform
  • high precision displacement measurement

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