Miniature Michelson interferometer based on an LTCC platform

Kimmo Keränen; Heikkinen Mikko; Niemelä Karri; Veli Heikkinen; Pentti Karioja

Miniature Michelson interferometer based on an LTCC platform

Kimmo Keränen, Heikkinen Mikko, Niemelä Karri, Veli Heikkinen, Pentti Karioja

Research output: Contribution to conference › Conference Poster › Scientific

Abstract

A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.

Original language	English
Publication status	Published - 2006
MoE publication type	Not Eligible
Event	Nordic Optics Days 2006: Northern Optices 2006 - Bergen, Norway Duration: 14 Jun 2006 → 16 Jun 2006

Conference

Conference	Nordic Optics Days 2006
Country/Territory	Norway
City	Bergen
Period	14/06/06 → 16/06/06

Keywords

miniature Michelson interferometer
LTCC platform
high precision displacement measurement

Cite this

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title = "Miniature Michelson interferometer based on an LTCC platform",

abstract = "A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.",

keywords = "miniature Michelson interferometer, LTCC platform, high precision displacement measurement",

author = "Kimmo Ker{\"a}nen and Heikkinen Mikko and Niemel{\"a} Karri and Veli Heikkinen and Pentti Karioja",

note = "Project code: E4SU00084; Nordic Optics Days 2006 : Northern Optices 2006 ; Conference date: 14-06-2006 Through 16-06-2006",

year = "2006",

language = "English",

}

TY - CONF

T1 - Miniature Michelson interferometer based on an LTCC platform

AU - Keränen, Kimmo

AU - Mikko, Heikkinen

AU - Karri, Niemelä

AU - Heikkinen, Veli

AU - Karioja, Pentti

N1 - Project code: E4SU00084

PY - 2006

Y1 - 2006

N2 - A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.

AB - A miniature Michelson interferometer based on low thermal co-fired ceramics (LTCC) platform was demonstrated. The interferometer was implemented on a 25 mm x 25 mm ceramic optical table, which thickness was 0.5 mm. Interferometer can be used in high-precision displacement measurements.

KW - miniature Michelson interferometer

KW - LTCC platform

KW - high precision displacement measurement

M3 - Conference Poster

T2 - Nordic Optics Days 2006

Y2 - 14 June 2006 through 16 June 2006

ER -

Miniature Michelson interferometer based on an LTCC platform

Abstract

Conference

Keywords

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