Miniaturised gas sensor on the basis of micromachined fabry-perot interferometer

Heikki Saari, Rami Mannila, Martti Blomberg, Outi Rusanen, Jussi Tenhunen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication3rd Round Table on Micro/Nano Technologies for Space
    PublisherEuropean Space Agency (ESA)
    Pages307-314
    Publication statusPublished - 2000
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event3rd ESA Round Table on Micro/Nano Technologies for Space - ESTEC, Noordwijk, Netherlands
    Duration: 15 May 200017 May 2000

    Publication series

    SeriesESA Conference Proceedings
    NumberWPP-174
    ISSN1022-6656

    Conference

    Conference3rd ESA Round Table on Micro/Nano Technologies for Space
    Country/TerritoryNetherlands
    CityNoordwijk
    Period15/05/0017/05/00

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