Miniaturised gas sensor on the basis of micromachined fabry-perot interferometer

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication3rd Round Table on Micro/Nano Technologies for Space
PublisherEuropean Space Agency ESA
Pages307-314
Publication statusPublished - 2000
MoE publication typeB3 Non-refereed article in conference proceedings
Event3rd ESA Round Table on Micro/Nano Technologies for Space - ESTEC, Noordwijk, Netherlands
Duration: 15 May 200017 May 2000

Publication series

SeriesESA Conference Proceedings
NumberWPP-174
ISSN1022-6656

Conference

Conference3rd ESA Round Table on Micro/Nano Technologies for Space
CountryNetherlands
CityNoordwijk
Period15/05/0017/05/00

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