Miniaturization and module integration of an infrared spectrometer

Kimmo Keränen, Pentti Karioja, Martti Blomberg, Jussi Tenhunen, Outi Rusanen, Harri Kopola

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Abstract

    When designing a miniaturized optoelectronic module, modeling of the system allows us to optimize structures, materials, and components to achieve optimal performance and cost effectiveness of the final product. We have used an approach in which an analytical model and simulation model support each other to speed up and enhance the system's development process. Our system integration approach includes analytical modeling and raytrace simulation modeling of the system, system realization, and system characterization. Our pilot miniaturized system is comprised of three silicon micromachined devices: an electrically modulated thermal infrared emitter, an electrically tunable Fabry-Perot interferometer (FPI), and a photodetector. The analytical modeling of the system was verified by optical raytracing simulation software. The simulation results were verified by experiments thus enhancing the development of the simulation model.
    Original languageEnglish
    Pages (from-to)2308-2314
    Number of pages7
    JournalOptical Engineering
    Volume40
    Issue number10
    DOIs
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

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