Miniaturization and module integration of an infrared spectrometer

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Abstract

When designing a miniaturized optoelectronic module, modeling of the system allows us to optimize structures, materials, and components to achieve optimal performance and cost effectiveness of the final product. We have used an approach in which an analytical model and simulation model support each other to speed up and enhance the system's development process. Our system integration approach includes analytical modeling and raytrace simulation modeling of the system, system realization, and system characterization. Our pilot miniaturized system is comprised of three silicon micromachined devices: an electrically modulated thermal infrared emitter, an electrically tunable Fabry-Perot interferometer (FPI), and a photodetector. The analytical modeling of the system was verified by optical raytracing simulation software. The simulation results were verified by experiments thus enhancing the development of the simulation model.
Original languageEnglish
Pages (from-to)2308-2314
Number of pages7
JournalOptical Engineering
Volume40
Issue number10
DOIs
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

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