Miniaturized MOEMS spectrometer technology for gas sensing

Jarkko Antila; Anna Rissanen; Rami Mannila; Jussi Mäkynen; Ismo Näkki; Mikko Tuohiniemi

doi:10.1109/OMN.2013.6659058

Miniaturized MOEMS spectrometer technology for gas sensing

Jarkko Antila, Anna Rissanen, Rami Mannila, Jussi Mäkynen, Ismo Näkki, Mikko Tuohiniemi

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Abstract

VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

Original language	English
Title of host publication	2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	59-60
ISBN (Electronic)	978-1-4799-1156-1
ISBN (Print)	978-1-4799-1512-5
DOIs	https://doi.org/10.1109/OMN.2013.6659058
Publication status	Published - 2013
MoE publication type	A4 Article in a conference publication
Event	International Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013

Conference

Conference	International Conference on Optical MEMS and Nanophotonics 2013
Country/Territory	Japan
City	Kanazawa
Period	18/08/13 → 22/08/13

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10.1109/OMN.2013.6659058

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title = "Miniaturized MOEMS spectrometer technology for gas sensing",

abstract = "VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.",

author = "Jarkko Antila and Anna Rissanen and Rami Mannila and Jussi M{\"a}kynen and Ismo N{\"a}kki and Mikko Tuohiniemi",

year = "2013",

doi = "10.1109/OMN.2013.6659058",

language = "English",

isbn = "978-1-4799-1512-5",

pages = "59--60",

booktitle = "2013 International Conference on Optical MEMS and Nanophotonics (OMN)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "International Conference on Optical MEMS and Nanophotonics 2013 ; Conference date: 18-08-2013 Through 22-08-2013",

}

Antila, J, Rissanen, A, Mannila, R, Mäkynen, J, Näkki, I & Tuohiniemi, M 2013, Miniaturized MOEMS spectrometer technology for gas sensing. in 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers, pp. 59-60, International Conference on Optical MEMS and Nanophotonics 2013, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659058

Miniaturized MOEMS spectrometer technology for gas sensing. / Antila, Jarkko; Rissanen, Anna; Mannila, Rami et al.
2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers, 2013. p. 59-60.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Miniaturized MOEMS spectrometer technology for gas sensing

AU - Antila, Jarkko

AU - Rissanen, Anna

AU - Mannila, Rami

AU - Mäkynen, Jussi

AU - Näkki, Ismo

AU - Tuohiniemi, Mikko

PY - 2013

Y1 - 2013

N2 - VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

AB - VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

U2 - 10.1109/OMN.2013.6659058

DO - 10.1109/OMN.2013.6659058

M3 - Conference article in proceedings

SN - 978-1-4799-1512-5

SP - 59

EP - 60

BT - 2013 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - International Conference on Optical MEMS and Nanophotonics 2013

Y2 - 18 August 2013 through 22 August 2013

ER -

Miniaturized MOEMS spectrometer technology for gas sensing

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