Miniaturized MOEMS spectrometer technology for gas sensing

Jarkko Antila, Anna Rissanen, Rami Mannila, Jussi Mäkynen, Ismo Näkki, Mikko Tuohiniemi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2013
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4799-1156-1
    ISBN (Print)978-1-4799-1512-5
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    EventInternational Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan
    Duration: 18 Aug 201322 Aug 2013


    ConferenceInternational Conference on Optical MEMS and Nanophotonics 2013


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