Miniaturized MOEMS spectrometer technology for gas sensing

Jarkko Antila, Anna Rissanen, Rami Mannila, Jussi Mäkynen, Ismo Näkki, Mikko Tuohiniemi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2013
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages59-60
ISBN (Electronic)978-1-4799-1156-1
ISBN (Print)978-1-4799-1512-5
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventInternational Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan
Duration: 18 Aug 201322 Aug 2013

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics 2013
CountryJapan
CityKanazawa
Period18/08/1322/08/13

Fingerprint

microoptoelectromechanical systems
Fabry-Perot interferometers
spectrometers
sensors
detectors
linear arrays
gases
pixels

Cite this

Antila, J., Rissanen, A., Mannila, R., Mäkynen, J., Näkki, I., & Tuohiniemi, M. (2013). Miniaturized MOEMS spectrometer technology for gas sensing. In Proceedings: International Conference on Optical MEMS and Nanophotonics, OMN 2013 (pp. 59-60). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/OMN.2013.6659058
Antila, Jarkko ; Rissanen, Anna ; Mannila, Rami ; Mäkynen, Jussi ; Näkki, Ismo ; Tuohiniemi, Mikko. / Miniaturized MOEMS spectrometer technology for gas sensing. Proceedings: International Conference on Optical MEMS and Nanophotonics, OMN 2013. Institute of Electrical and Electronic Engineers IEEE, 2013. pp. 59-60
@inproceedings{375d522d713d41dbb9f7470bd22edf5d,
title = "Miniaturized MOEMS spectrometer technology for gas sensing",
abstract = "VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.",
author = "Jarkko Antila and Anna Rissanen and Rami Mannila and Jussi M{\"a}kynen and Ismo N{\"a}kki and Mikko Tuohiniemi",
year = "2013",
doi = "10.1109/OMN.2013.6659058",
language = "English",
isbn = "978-1-4799-1512-5",
pages = "59--60",
booktitle = "Proceedings",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Antila, J, Rissanen, A, Mannila, R, Mäkynen, J, Näkki, I & Tuohiniemi, M 2013, Miniaturized MOEMS spectrometer technology for gas sensing. in Proceedings: International Conference on Optical MEMS and Nanophotonics, OMN 2013. Institute of Electrical and Electronic Engineers IEEE, pp. 59-60, International Conference on Optical MEMS and Nanophotonics 2013, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659058

Miniaturized MOEMS spectrometer technology for gas sensing. / Antila, Jarkko; Rissanen, Anna; Mannila, Rami; Mäkynen, Jussi; Näkki, Ismo; Tuohiniemi, Mikko.

Proceedings: International Conference on Optical MEMS and Nanophotonics, OMN 2013. Institute of Electrical and Electronic Engineers IEEE, 2013. p. 59-60.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Miniaturized MOEMS spectrometer technology for gas sensing

AU - Antila, Jarkko

AU - Rissanen, Anna

AU - Mannila, Rami

AU - Mäkynen, Jussi

AU - Näkki, Ismo

AU - Tuohiniemi, Mikko

PY - 2013

Y1 - 2013

N2 - VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

AB - VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

U2 - 10.1109/OMN.2013.6659058

DO - 10.1109/OMN.2013.6659058

M3 - Conference article in proceedings

SN - 978-1-4799-1512-5

SP - 59

EP - 60

BT - Proceedings

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Antila J, Rissanen A, Mannila R, Mäkynen J, Näkki I, Tuohiniemi M. Miniaturized MOEMS spectrometer technology for gas sensing. In Proceedings: International Conference on Optical MEMS and Nanophotonics, OMN 2013. Institute of Electrical and Electronic Engineers IEEE. 2013. p. 59-60 https://doi.org/10.1109/OMN.2013.6659058