Miniaturized spectrometer technologies

Jarkko Antila

doi:10.1109/WIO.2010.5582486

Miniaturized spectrometer technologies

Jarkko Antila

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Abstract

VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	9th Euro-American Workshop on Information Optics, WIO 2010
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	4
ISBN (Electronic)	978-1-4244-8227-6
ISBN (Print)	978-1-4244-8226-9
DOIs	https://doi.org/10.1109/WIO.2010.5582486
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	9th Euro-American Workshop on Information Optics, WIO 2010 - Helsinki, Finland Duration: 12 Jul 2010 → 16 Jul 2010

Conference

Conference	9th Euro-American Workshop on Information Optics, WIO 2010
Abbreviated title	WIO 2010
Country	Finland
City	Helsinki
Period	12/07/10 → 16/07/10

Access to Document

10.1109/WIO.2010.5582486

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Cite this

@inproceedings{9bc02a5d48bc450fafe8bfae8cc31182,

title = "Miniaturized spectrometer technologies",

abstract = "VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)",

author = "Jarkko Antila",

year = "2010",

doi = "10.1109/WIO.2010.5582486",

language = "English",

isbn = "978-1-4244-8226-9",

booktitle = "Proceedings",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "9th Euro-American Workshop on Information Optics, WIO 2010, WIO 2010 ; Conference date: 12-07-2010 Through 16-07-2010",

}

TY - GEN

T1 - Miniaturized spectrometer technologies

AU - Antila, Jarkko

PY - 2010

Y1 - 2010

N2 - VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)

AB - VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)

U2 - 10.1109/WIO.2010.5582486

DO - 10.1109/WIO.2010.5582486

M3 - Conference article in proceedings

SN - 978-1-4244-8226-9

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

T2 - 9th Euro-American Workshop on Information Optics, WIO 2010

Y2 - 12 July 2010 through 16 July 2010

ER -