Abstract
VTT has developed new MEMS based spectrometer
technologies to meet various spectral sensing demands
from UV to thermal IR. New inventions have been made to
cover wavelength ranges from 350 nm up to 14 µm and to
enlarge apertures of devices for increased throughput.
This paper reviews VTT's surface micromachined
Fabry-Perot interferometer technologies, highlights their
key parameters and describes the related instrumentation.
(13 refs.)
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | 9th Euro-American Workshop on Information Optics, WIO 2010 |
| Place of Publication | Piscataway, NJ, USA |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Number of pages | 4 |
| ISBN (Electronic) | 978-1-4244-8227-6 |
| ISBN (Print) | 978-1-4244-8226-9 |
| DOIs | |
| Publication status | Published - 2010 |
| MoE publication type | A4 Article in a conference publication |
| Event | 9th Euro-American Workshop on Information Optics, WIO 2010 - Helsinki, Finland Duration: 12 Jul 2010 → 16 Jul 2010 |
Conference
| Conference | 9th Euro-American Workshop on Information Optics, WIO 2010 |
|---|---|
| Abbreviated title | WIO 2010 |
| Country | Finland |
| City | Helsinki |
| Period | 12/07/10 → 16/07/10 |
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Cite this
Antila, J. (2010). Miniaturized spectrometer technologies. In Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010 IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/WIO.2010.5582486