Miniaturized spectrometer technologies

Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication9th Euro-American Workshop on Information Optics, WIO 2010
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-4244-8227-6
ISBN (Print)978-1-4244-8226-9
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event9th Euro-American Workshop on Information Optics, WIO 2010 - Helsinki, Finland
Duration: 12 Jul 201016 Jul 2010

Conference

Conference9th Euro-American Workshop on Information Optics, WIO 2010
Abbreviated titleWIO 2010
CountryFinland
CityHelsinki
Period12/07/1016/07/10

Fingerprint

spectrometer
interferometer
instrumentation
wavelength
demand
parameter

Cite this

Antila, J. (2010). Miniaturized spectrometer technologies. In Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010 Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/WIO.2010.5582486
Antila, Jarkko. / Miniaturized spectrometer technologies. Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010.
@inproceedings{9bc02a5d48bc450fafe8bfae8cc31182,
title = "Miniaturized spectrometer technologies",
abstract = "VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)",
author = "Jarkko Antila",
year = "2010",
doi = "10.1109/WIO.2010.5582486",
language = "English",
isbn = "978-1-4244-8226-9",
booktitle = "Proceedings",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",

}

Antila, J 2010, Miniaturized spectrometer technologies. in Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. IEEE Institute of Electrical and Electronic Engineers , Piscataway, NJ, USA, 9th Euro-American Workshop on Information Optics, WIO 2010, Helsinki, Finland, 12/07/10. https://doi.org/10.1109/WIO.2010.5582486

Miniaturized spectrometer technologies. / Antila, Jarkko.

Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Miniaturized spectrometer technologies

AU - Antila, Jarkko

PY - 2010

Y1 - 2010

N2 - VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)

AB - VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)

U2 - 10.1109/WIO.2010.5582486

DO - 10.1109/WIO.2010.5582486

M3 - Conference article in proceedings

SN - 978-1-4244-8226-9

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

ER -

Antila J. Miniaturized spectrometer technologies. In Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . 2010 https://doi.org/10.1109/WIO.2010.5582486