Miniaturized spectrometer technologies

Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication9th Euro-American Workshop on Information Optics, WIO 2010
Place of PublicationPiscataway, NJ, USA
PublisherInstitute of Electrical and Electronic Engineers IEEE
Number of pages4
ISBN (Electronic)978-1-4244-8227-6
ISBN (Print)978-1-4244-8226-9
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event9th Euro-American Workshop on Information Optics, WIO 2010 - Helsinki, Finland
Duration: 12 Jul 201016 Jul 2010

Conference

Conference9th Euro-American Workshop on Information Optics, WIO 2010
Abbreviated titleWIO 2010
CountryFinland
CityHelsinki
Period12/07/1016/07/10

Fingerprint

spectrometer
interferometer
instrumentation
wavelength
demand
parameter

Cite this

Antila, J. (2010). Miniaturized spectrometer technologies. In Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010 Piscataway, NJ, USA: Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/WIO.2010.5582486
Antila, Jarkko. / Miniaturized spectrometer technologies. Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA : Institute of Electrical and Electronic Engineers IEEE, 2010.
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Antila, J 2010, Miniaturized spectrometer technologies. in Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Institute of Electrical and Electronic Engineers IEEE, Piscataway, NJ, USA, 9th Euro-American Workshop on Information Optics, WIO 2010, Helsinki, Finland, 12/07/10. https://doi.org/10.1109/WIO.2010.5582486

Miniaturized spectrometer technologies. / Antila, Jarkko.

Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA : Institute of Electrical and Electronic Engineers IEEE, 2010.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Antila J. Miniaturized spectrometer technologies. In Proceedings: 9th Euro-American Workshop on Information Optics, WIO 2010. Piscataway, NJ, USA: Institute of Electrical and Electronic Engineers IEEE. 2010 https://doi.org/10.1109/WIO.2010.5582486