Miniaturized spectrometer technologies

Jarkko Antila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation. (13 refs.)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication9th Euro-American Workshop on Information Optics, WIO 2010
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages4
ISBN (Electronic)978-1-4244-8227-6
ISBN (Print)978-1-4244-8226-9
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event9th Euro-American Workshop on Information Optics, WIO 2010 - Helsinki, Finland
Duration: 12 Jul 201016 Jul 2010


Conference9th Euro-American Workshop on Information Optics, WIO 2010
Abbreviated titleWIO 2010


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