Abstract
mirror plate (100) for a Fabry-Perot interferometer (300) includes
a substrate (50), which includes silicon (Si),
a semi-transparent reflective coating (110) implemented on the substrate (50),
a de-coupling structure (DC1) formed on the substrate (50),
a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and
a second sensor electrode (G1b),
wherein the de-coupling structure (DC1) includes an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).
Patent family as of 2.12.2021
CN107250741 A 20171013 CN201580077176 20151218
CN107250741 B 20180605 CN201580077176 20151218
DE602015030993 D1 20190613 DE201560030993T 20151218
EP3241002 A1 20171108 EP20150875303 20151218
EP3241002 A4 20180110 EP20150875303 20151218
EP3241002 B1 20190522 EP20150875303 20151218
FI126791 B 20170531 FI20140006151 20141229
FI20146151 A 20160630 FI20140006151 20141229
JP2018508826 T2 20180329 JP20170544031T 20151218
JP6255543 B1 20171227 JP20170544031T 20151218
US10088362 BB 20181002 US20150540074 20151218
US2017350761 AA 20171207 US20150540074 20151218
WO16107973 A1 20160707 WO2015FI50909
a substrate (50), which includes silicon (Si),
a semi-transparent reflective coating (110) implemented on the substrate (50),
a de-coupling structure (DC1) formed on the substrate (50),
a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and
a second sensor electrode (G1b),
wherein the de-coupling structure (DC1) includes an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).
Patent family as of 2.12.2021
CN107250741 A 20171013 CN201580077176 20151218
CN107250741 B 20180605 CN201580077176 20151218
DE602015030993 D1 20190613 DE201560030993T 20151218
EP3241002 A1 20171108 EP20150875303 20151218
EP3241002 A4 20180110 EP20150875303 20151218
EP3241002 B1 20190522 EP20150875303 20151218
FI126791 B 20170531 FI20140006151 20141229
FI20146151 A 20160630 FI20140006151 20141229
JP2018508826 T2 20180329 JP20170544031T 20151218
JP6255543 B1 20171227 JP20170544031T 20151218
US10088362 BB 20181002 US20150540074 20151218
US2017350761 AA 20171207 US20150540074 20151218
WO16107973 A1 20160707 WO2015FI50909
Link to currentpatent family on right
| Original language | English |
|---|---|
| Patent number | EP3241002 |
| IPC | G02B 26/ 00 A I |
| Priority date | 18/12/15 |
| Publication status | Published - 8 Nov 2017 |
| MoE publication type | H1 Granted patent |