Mix and Match of NIL with UV-Lithography

H.C. Scheer; H. Schulz; M. Wissen; K. Pfeiffer; F. Reuther; G. Grueztner; L. Montelius; B. Heidari; Jouni Ahopelto; Tomi Haatainen; Ch. Cardinaud; F. Gaboriau

Mix and Match of NIL with UV-Lithography

H.C. Scheer
, H. Schulz
, M. Wissen
, K. Pfeiffer
, F. Reuther
, G. Grueztner
, L. Montelius
, B. Heidari
, Jouni Ahopelto
, Tomi Haatainen
, Ch. Cardinaud
, F. Gaboriau

University of Wuppertal
Microresist Technology GmbH
Lund University
University of Nantes

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceeding of the First International Conference on Nanoimprint Nanoprint Technology
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	22-23
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography

Cite this

@inbook{476602f87e78455ea0b8fbdc80d6b2bf,

title = "Mix and Match of NIL with UV-Lithography",

keywords = "Nanoimprint Lithography",

author = "H.C. Scheer and H. Schulz and M. Wissen and K. Pfeiffer and F. Reuther and G. Grueztner and L. Montelius and B. Heidari and Jouni Ahopelto and Tomi Haatainen and Ch. Cardinaud and F. Gaboriau",

year = "2002",

language = "English",

pages = "22--23",

booktitle = "Proceeding of the First International Conference on Nanoimprint Nanoprint Technology",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Scheer, HC, Schulz, H, Wissen, M, Pfeiffer, K, Reuther, F, Grueztner, G, Montelius, L, Heidari, B, Ahopelto, J , Haatainen, T, Cardinaud, C & Gaboriau, F 2002, Mix and Match of NIL with UV-Lithography. in Proceeding of the First International Conference on Nanoimprint Nanoprint Technology. Naval Research Laboratory, San Francisco, pp. 22-23, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

TY - CHAP

T1 - Mix and Match of NIL with UV-Lithography

AU - Scheer, H.C.

AU - Schulz, H.

AU - Wissen, M.

AU - Pfeiffer, K.

AU - Reuther, F.

AU - Grueztner, G.

AU - Montelius, L.

AU - Heidari, B.

AU - Ahopelto, Jouni

AU - Haatainen, Tomi

AU - Cardinaud, Ch.

AU - Gaboriau, F.

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 22

EP - 23

BT - Proceeding of the First International Conference on Nanoimprint Nanoprint Technology

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -