MOCVD Al(Ga)N Insulator for Alternative Silicon-On-Insulator Structure

Glenn Ross, Ville Luntinen, Mikael Broas, Sami Suihkonen, Turkka Tuomi, Aapo Lankinen, Andreas Danilewsky, Markku Tilli, Mervi Paulasto-Kröckel

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

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Keyphrases

INIS

Engineering

Material Science