Modeling growth kinetics of thin films made by atomic layer deposition in lateral high-aspect-ratio structures

Markku Ylilammi*, Oili M.E. Ylivaara, Riikka L. Puurunen

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    48 Citations (Scopus)

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    Engineering

    Material Science