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Modeling growth kinetics of thin films made by atomic layer deposition in lateral high-aspect-ratio structures

  • Markku Ylilammi*
  • , Oili M.E. Ylivaara
  • , Riikka L. Puurunen
    • *Corresponding author for this work
    • VTT (former employee or external)
    • Aalto University

    Research output: Contribution to journal › Article › Scientific › peer-review

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