Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

T. Veijola; Tomi Mattila

doi:10.1002/mmce.1039

Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

T. Veijola (Corresponding Author), Tomi Mattila

BA1408 Flexible sensors and devices

Research output: Contribution to journal › Article › Scientific › peer-review

36 Citations (Scopus)

Abstract

A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.

Original language	English
Pages (from-to)	310-321
Number of pages	12
Journal	International Journal of RF and Microwave Computer-Aided Engineering
Volume	11
Issue number	5
DOIs	https://doi.org/10.1002/mmce.1039
Publication status	Published - 2001
MoE publication type	A1 Journal article-refereed

Keywords

micromechanical oscillators

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10.1002/mmce.1039

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Veijola, T., & Mattila, T. (2001). Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method. International Journal of RF and Microwave Computer-Aided Engineering, 11(5), 310-321. https://doi.org/10.1002/mmce.1039

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