Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

T. Veijola; Tomi Mattila

doi:10.1002/mmce.1039

Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

T. Veijola (Corresponding Author), Tomi Mattila

BA1408 Flexible sensors and devices

Research output: Contribution to journal › Article › Scientific › peer-review

39 Citations (Scopus)

Abstract

A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.

Original language	English
Pages (from-to)	310-321
Number of pages	12
Journal	International Journal of RF and Microwave Computer-Aided Engineering
Volume	11
Issue number	5
DOIs	https://doi.org/10.1002/mmce.1039
Publication status	Published - 2001
MoE publication type	A1 Journal article-refereed

Keywords

micromechanical oscillators

Access to Document

10.1002/mmce.1039

Fingerprint Dive into the research topics of 'Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method'. Together they form a unique fingerprint.

Cite this

@article{77063ef9e3614a73a53e5678f904883d,

title = "Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method",

abstract = "A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.",

keywords = "micromechanical oscillators",

author = "T. Veijola and Tomi Mattila",

year = "2001",

doi = "10.1002/mmce.1039",

language = "English",

volume = "11",

pages = "310--321",

journal = "International Journal of RF and Microwave Computer-Aided Engineering",

issn = "1096-4290",

publisher = "Wiley",

number = "5",

}

TY - JOUR

T1 - Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

AU - Veijola, T.

AU - Mattila, Tomi

PY - 2001

Y1 - 2001

N2 - A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.

AB - A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.

KW - micromechanical oscillators

U2 - 10.1002/mmce.1039

DO - 10.1002/mmce.1039

M3 - Article

VL - 11

SP - 310

EP - 321

JO - International Journal of RF and Microwave Computer-Aided Engineering

JF - International Journal of RF and Microwave Computer-Aided Engineering

SN - 1096-4290

IS - 5

ER -