Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 310-321 |
| Number of pages | 12 |
| Journal | International Journal of RF and Microwave Computer-Aided Engineering |
| Volume | 11 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2001 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- micromechanical oscillators
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Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method. / Veijola, T. (Corresponding Author); Mattila, Tomi.
In: International Journal of RF and Microwave Computer-Aided Engineering, Vol. 11, No. 5, 2001, p. 310-321.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method
AU - Veijola, T.
AU - Mattila, Tomi
PY - 2001
Y1 - 2001
N2 - A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.
AB - A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.
KW - micromechanical oscillators
U2 - 10.1002/mmce.1039
DO - 10.1002/mmce.1039
M3 - Article
VL - 11
SP - 310
EP - 321
JO - International Journal of RF and Microwave Computer-Aided Engineering
JF - International Journal of RF and Microwave Computer-Aided Engineering
SN - 1096-4290
IS - 5
ER -