Modeling of nonlinear micromechanical resonators and their simulation with the harmonic-balance method

T. Veijola (Corresponding Author), Tomi Mattila

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A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.
Original languageEnglish
Pages (from-to)310-321
Number of pages12
JournalInternational Journal of RF and Microwave Computer-Aided Engineering
Issue number5
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed



  • micromechanical oscillators

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