A model for a micromachined electrostatically driven high‐Q beam resonator is constructed of nonlinear voltage‐controlled current and charge sources. Its characteristics are simulated with the harmonic‐balance method in the RF simulation program APLAC demonstrating both the spring softening and hardening effects in the capacitive transducer and in the nonlinear mass‐spring systems. Measured large‐signal frequency‐domain transfer characteristics of a test resonator structure at various signal levels were accurately reproduced by model simulations.
|Number of pages||12|
|Journal||International Journal of RF and Microwave Computer-Aided Engineering|
|Publication status||Published - 2001|
|MoE publication type||A1 Journal article-refereed|
- micromechanical oscillators