Modeling Thermal Effects in Atomic Layer Deposition for Trench-Shaped Structures
- Gizem Ersavas Isitman*
- , Daulet Izbassarov
- , Parsa Tamadonfar
- , Riikka, L. Puurunen
- , Ville Vuorinen
*Corresponding author for this work
- Aalto University
- Finnish Meteorological Institute (FMI)
Research output: Contribution to journal › Article › Scientific › peer-review
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