Abstract
Lateral resonances occurring in bulk acoustic wave resonators contribute
to the device operation, e.g., by creating spurious electrical responses.
Predicting lateral effects in two dimensions typically requires
computationally heavy 3-D finite element modelling. Here, dispersion
characteristics calculated using a 1-D transfer matrix model are used in a
finite-element software to model lateral resonance modes of sol-idly-mounted
bulk acoustic wave resonators. Based on the resulting spectrum of 2-D
eigenmodes, elec-trical frequency response as well as mechanical displacement
is then calculated using mode superposi-tion. Resonators with elliptic and
rectangular shapes are studied. Simulated results for ellipses are com-pared
to measured electrical frequency response and mechanical displacement.
Simulations are found to agree with measured data. Dependence of electrical
spurious responses on resonator shape and eigen-mode spectrum is studied.
Original language | English |
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Title of host publication | Proceedings |
Subtitle of host publication | IEEE International Ultrasonics Symposium, ULTSYM 2008 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 1544-1547 |
ISBN (Print) | 978-1-4244-2428-3, 978-1-4244-2480-1 |
DOIs | |
Publication status | Published - 2008 |
MoE publication type | A4 Article in a conference publication |
Event | IEEE Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008 |
Conference
Conference | IEEE Ultrasonics Symposium |
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Country/Territory | China |
City | Beijing |
Period | 2/11/08 → 5/11/08 |
Keywords
- Bulk acoustic wave resonators
- modelling
- lateral resonances
- eigenmodes
- interferometric measurements