Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Johanna Meltaus, Kimmo Kokkonen, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)

Abstract

Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE International Ultrasonics Symposium, ULTSYM 2008
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1544-1547
ISBN (Print)978-1-4244-2428-3, 978-1-4244-2480-1
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008

Conference

ConferenceIEEE Ultrasonics Symposium
CountryChina
CityBeijing
Period2/11/085/11/08

Fingerprint

resonators
frequency response
acoustics
ellipses
computer programs
simulation

Keywords

  • Bulk acoustic wave resonators
  • modelling
  • lateral resonances
  • eigenmodes
  • interferometric measurements

Cite this

Meltaus, J., Kokkonen, K., & Pensala, T. (2008). Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. In Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008 (pp. 1544-1547). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2008.0376
Meltaus, Johanna ; Kokkonen, Kimmo ; Pensala, Tuomas. / Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers , 2008. pp. 1544-1547
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Meltaus, J, Kokkonen, K & Pensala, T 2008, Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. in Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers , pp. 1544-1547, IEEE Ultrasonics Symposium, Beijing, China, 2/11/08. https://doi.org/10.1109/ULTSYM.2008.0376

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. / Meltaus, Johanna; Kokkonen, Kimmo; Pensala, Tuomas.

Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers , 2008. p. 1544-1547.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Kokkonen, Kimmo

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N2 - Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.

AB - Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.

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Meltaus J, Kokkonen K, Pensala T. Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. In Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers . 2008. p. 1544-1547 https://doi.org/10.1109/ULTSYM.2008.0376