Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Johanna Meltaus, Kimmo Kokkonen, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    9 Citations (Scopus)

    Abstract

    Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE International Ultrasonics Symposium, ULTSYM 2008
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1544-1547
    ISBN (Print)978-1-4244-2428-3, 978-1-4244-2480-1
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium - Beijing, China
    Duration: 2 Nov 20085 Nov 2008

    Conference

    ConferenceIEEE Ultrasonics Symposium
    CountryChina
    CityBeijing
    Period2/11/085/11/08

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    Keywords

    • Bulk acoustic wave resonators
    • modelling
    • lateral resonances
    • eigenmodes
    • interferometric measurements

    Cite this

    Meltaus, J., Kokkonen, K., & Pensala, T. (2008). Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. In Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008 (pp. 1544-1547). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2008.0376