Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Johanna Meltaus; Kimmo Kokkonen; Tuomas Pensala

doi:10.1109/ULTSYM.2008.0376

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Johanna Meltaus
, Kimmo Kokkonen
, Tuomas Pensala

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

10 Citations (Scopus)

Abstract

Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IEEE International Ultrasonics Symposium, ULTSYM 2008
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1544-1547
ISBN (Print)	978-1-4244-2428-3, 978-1-4244-2480-1
DOIs	https://doi.org/10.1109/ULTSYM.2008.0376
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008

Conference

Conference	IEEE Ultrasonics Symposium
Country/Territory	China
City	Beijing
Period	2/11/08 → 5/11/08

Keywords

Bulk acoustic wave resonators
modelling
lateral resonances
eigenmodes
interferometric measurements

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10.1109/ULTSYM.2008.0376

Cite this

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title = "Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators",

abstract = "Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.",

keywords = "Bulk acoustic wave resonators, modelling, lateral resonances, eigenmodes, interferometric measurements",

author = "Johanna Meltaus and Kimmo Kokkonen and Tuomas Pensala",

year = "2008",

doi = "10.1109/ULTSYM.2008.0376",

language = "English",

isbn = "978-1-4244-2428-3",

pages = "1544--1547",

booktitle = "Proceedings",

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note = "IEEE Ultrasonics Symposium ; Conference date: 02-11-2008 Through 05-11-2008",

}

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators. / Meltaus, Johanna; Kokkonen, Kimmo; Pensala, Tuomas.
Proceedings: IEEE International Ultrasonics Symposium, ULTSYM 2008. IEEE Institute of Electrical and Electronic Engineers, 2008. p. 1544-1547.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

AU - Meltaus, Johanna

AU - Kokkonen, Kimmo

AU - Pensala, Tuomas

PY - 2008

Y1 - 2008

N2 - Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.

AB - Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a finite-element software to model lateral resonance modes of sol-idly-mounted bulk acoustic wave resonators. Based on the resulting spectrum of 2-D eigenmodes, elec-trical frequency response as well as mechanical displacement is then calculated using mode superposi-tion. Resonators with elliptic and rectangular shapes are studied. Simulated results for ellipses are com-pared to measured electrical frequency response and mechanical displacement. Simulations are found to agree with measured data. Dependence of electrical spurious responses on resonator shape and eigen-mode spectrum is studied.

KW - Bulk acoustic wave resonators

KW - modelling

KW - lateral resonances

KW - eigenmodes

KW - interferometric measurements

U2 - 10.1109/ULTSYM.2008.0376

DO - 10.1109/ULTSYM.2008.0376

M3 - Conference article in proceedings

SN - 978-1-4244-2428-3

SN - 978-1-4244-2480-1

SP - 1544

EP - 1547

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE Ultrasonics Symposium

Y2 - 2 November 2008 through 5 November 2008

ER -

Modelling of 2-D Lateral Modes in Solidly-Mounted BAW Resonators

Abstract

Conference

Keywords

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