| Original language | English |
|---|---|
| Article number | 17 |
| Journal | Industrial Horizons |
| Issue number | December |
| Publication status | Published - 1997 |
| MoE publication type | D1 Article in a trade journal |
Cite this
Heleskivi, J. (1997). Modern facility for microelectronics research. Industrial Horizons, (December), [17].