Modern facility for microelectronics research

Jouni Heleskivi

Research output: Contribution to journalArticleProfessional

Original languageEnglish
Article number17
JournalIndustrial Horizons
Issue numberDecember
Publication statusPublished - 1997
MoE publication typeD1 Article in a trade journal

Cite this

Heleskivi, J. (1997). Modern facility for microelectronics research. Industrial Horizons, (December), [17].
Heleskivi, Jouni. / Modern facility for microelectronics research. In: Industrial Horizons. 1997 ; No. December.
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title = "Modern facility for microelectronics research",
author = "Jouni Heleskivi",
year = "1997",
language = "English",
journal = "VTT Impulse",
issn = "1798-0178",
publisher = "VTT Technical Research Centre of Finland",
number = "December",

}

Modern facility for microelectronics research. / Heleskivi, Jouni.

In: Industrial Horizons, No. December, 17, 1997.

Research output: Contribution to journalArticleProfessional

TY - JOUR

T1 - Modern facility for microelectronics research

AU - Heleskivi, Jouni

PY - 1997

Y1 - 1997

M3 - Article

JO - VTT Impulse

JF - VTT Impulse

SN - 1798-0178

IS - December

M1 - 17

ER -