MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi; B. Guo; R. Mannila; A. Rissanen

doi:10.1117/12.2214710

MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi, B. Guo, R. Mannila, A. Rissanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

7 Citations (Scopus)

Abstract

This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems XV
Publisher	International Society for Optics and Photonics SPIE
Volume	9760
ISBN (Electronic)	9781628419955
DOIs	https://doi.org/10.1117/12.2214710
Publication status	Published - 1 Jan 2016
MoE publication type	A4 Article in a conference publication
Event	MOEMS and Miniaturized Systems XV - San Francisco, United States Duration: 15 Feb 2016 → 17 Feb 2016

Conference

Conference	MOEMS and Miniaturized Systems XV
Country	United States
City	San Francisco
Period	15/02/16 → 17/02/16

Keywords

Automotive
Fabry-Perot interferometer
Gas sensing
Microspectrometers
MOEMS
NIR - MIR

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title = "MOEMS FPI sensors for NIR-MIR microspectrometer applications",

abstract = "This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.",

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author = "A. Akuj{\"a}rvi and B. Guo and R. Mannila and A. Rissanen",

year = "2016",

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AU - Akujärvi, A.

AU - Guo, B.

AU - Mannila, R.

AU - Rissanen, A.

PY - 2016/1/1

Y1 - 2016/1/1

N2 - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

AB - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

KW - Automotive

KW - Fabry-Perot interferometer

KW - Gas sensing

KW - Microspectrometers

KW - MOEMS

KW - NIR - MIR

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M3 - Conference article in proceedings

AN - SCOPUS:84987631677

VL - 9760

BT - MOEMS and Miniaturized Systems XV

PB - International Society for Optics and Photonics SPIE

T2 - MOEMS and Miniaturized Systems XV

Y2 - 15 February 2016 through 17 February 2016

ER -

MOEMS FPI sensors for NIR-MIR microspectrometer applications

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