MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi, B. Guo, R. Mannila, A. Rissanen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XV
    PublisherInternational Society for Optics and Photonics SPIE
    Volume9760
    ISBN (Electronic)9781628419955
    DOIs
    Publication statusPublished - 1 Jan 2016
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XV - San Francisco, United States
    Duration: 15 Feb 201617 Feb 2016

    Conference

    ConferenceMOEMS and Miniaturized Systems XV
    CountryUnited States
    CitySan Francisco
    Period15/02/1617/02/16

    Fingerprint

    MOEMS
    Fabry-Perot Interferometer
    microoptoelectromechanical systems
    Fabry-Perot interferometers
    Micro-electro-mechanical Systems
    Bragg reflectors
    microelectromechanical systems
    MEMS
    Sensor
    Sensing
    sensors
    Sensors
    Reflector
    Hydrocarbons
    Thin Films
    hydrocarbons
    Vapors
    Range of data
    Wavelength
    vapors

    Keywords

    • Automotive
    • Fabry-Perot interferometer
    • Gas sensing
    • Microspectrometers
    • MOEMS
    • NIR - MIR

    Cite this

    Akujärvi, A., Guo, B., Mannila, R., & Rissanen, A. (2016). MOEMS FPI sensors for NIR-MIR microspectrometer applications. In MOEMS and Miniaturized Systems XV (Vol. 9760). [97600M] International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2214710
    Akujärvi, A. ; Guo, B. ; Mannila, R. ; Rissanen, A. / MOEMS FPI sensors for NIR-MIR microspectrometer applications. MOEMS and Miniaturized Systems XV. Vol. 9760 International Society for Optics and Photonics SPIE, 2016.
    @inproceedings{e05e415fc2734a30943677b30dd1d13f,
    title = "MOEMS FPI sensors for NIR-MIR microspectrometer applications",
    abstract = "This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.",
    keywords = "Automotive, Fabry-Perot interferometer, Gas sensing, Microspectrometers, MOEMS, NIR - MIR",
    author = "A. Akuj{\"a}rvi and B. Guo and R. Mannila and A. Rissanen",
    year = "2016",
    month = "1",
    day = "1",
    doi = "10.1117/12.2214710",
    language = "English",
    volume = "9760",
    booktitle = "MOEMS and Miniaturized Systems XV",
    publisher = "International Society for Optics and Photonics SPIE",
    address = "United States",

    }

    Akujärvi, A, Guo, B, Mannila, R & Rissanen, A 2016, MOEMS FPI sensors for NIR-MIR microspectrometer applications. in MOEMS and Miniaturized Systems XV. vol. 9760, 97600M, International Society for Optics and Photonics SPIE, MOEMS and Miniaturized Systems XV, San Francisco, United States, 15/02/16. https://doi.org/10.1117/12.2214710

    MOEMS FPI sensors for NIR-MIR microspectrometer applications. / Akujärvi, A.; Guo, B.; Mannila, R.; Rissanen, A.

    MOEMS and Miniaturized Systems XV. Vol. 9760 International Society for Optics and Photonics SPIE, 2016. 97600M.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - MOEMS FPI sensors for NIR-MIR microspectrometer applications

    AU - Akujärvi, A.

    AU - Guo, B.

    AU - Mannila, R.

    AU - Rissanen, A.

    PY - 2016/1/1

    Y1 - 2016/1/1

    N2 - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

    AB - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

    KW - Automotive

    KW - Fabry-Perot interferometer

    KW - Gas sensing

    KW - Microspectrometers

    KW - MOEMS

    KW - NIR - MIR

    UR - http://www.scopus.com/inward/record.url?scp=84987631677&partnerID=8YFLogxK

    U2 - 10.1117/12.2214710

    DO - 10.1117/12.2214710

    M3 - Conference article in proceedings

    AN - SCOPUS:84987631677

    VL - 9760

    BT - MOEMS and Miniaturized Systems XV

    PB - International Society for Optics and Photonics SPIE

    ER -

    Akujärvi A, Guo B, Mannila R, Rissanen A. MOEMS FPI sensors for NIR-MIR microspectrometer applications. In MOEMS and Miniaturized Systems XV. Vol. 9760. International Society for Optics and Photonics SPIE. 2016. 97600M https://doi.org/10.1117/12.2214710