Abstract
This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.
| Original language | English |
|---|---|
| Title of host publication | MOEMS and Miniaturized Systems XV |
| Publisher | International Society for Optics and Photonics SPIE |
| Volume | 9760 |
| ISBN (Electronic) | 9781628419955 |
| DOIs | |
| Publication status | Published - 1 Jan 2016 |
| MoE publication type | A4 Article in a conference publication |
| Event | MOEMS and Miniaturized Systems XV - San Francisco, United States Duration: 15 Feb 2016 → 17 Feb 2016 |
Conference
| Conference | MOEMS and Miniaturized Systems XV |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 15/02/16 → 17/02/16 |
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Keywords
- Automotive
- Fabry-Perot interferometer
- Gas sensing
- Microspectrometers
- MOEMS
- NIR - MIR
Cite this
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MOEMS FPI sensors for NIR-MIR microspectrometer applications. / Akujärvi, A.; Guo, B.; Mannila, R.; Rissanen, A.
MOEMS and Miniaturized Systems XV. Vol. 9760 International Society for Optics and Photonics SPIE, 2016. 97600M.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - MOEMS FPI sensors for NIR-MIR microspectrometer applications
AU - Akujärvi, A.
AU - Guo, B.
AU - Mannila, R.
AU - Rissanen, A.
PY - 2016/1/1
Y1 - 2016/1/1
N2 - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.
AB - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.
KW - Automotive
KW - Fabry-Perot interferometer
KW - Gas sensing
KW - Microspectrometers
KW - MOEMS
KW - NIR - MIR
UR - http://www.scopus.com/inward/record.url?scp=84987631677&partnerID=8YFLogxK
U2 - 10.1117/12.2214710
DO - 10.1117/12.2214710
M3 - Conference article in proceedings
AN - SCOPUS:84987631677
VL - 9760
BT - MOEMS and Miniaturized Systems XV
PB - International Society for Optics and Photonics SPIE
ER -