MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi, B. Guo, R. Mannila, A. Rissanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XV
PublisherInternational Society for Optics and Photonics SPIE
Volume9760
ISBN (Electronic)9781628419955
DOIs
Publication statusPublished - 1 Jan 2016
MoE publication typeA4 Article in a conference publication
EventMOEMS and Miniaturized Systems XV - San Francisco, United States
Duration: 15 Feb 201617 Feb 2016

Conference

ConferenceMOEMS and Miniaturized Systems XV
CountryUnited States
CitySan Francisco
Period15/02/1617/02/16

Fingerprint

MOEMS
Fabry-Perot Interferometer
microoptoelectromechanical systems
Fabry-Perot interferometers
Micro-electro-mechanical Systems
Bragg reflectors
microelectromechanical systems
MEMS
Sensor
Sensing
sensors
Sensors
Reflector
Hydrocarbons
Thin Films
hydrocarbons
Vapors
Range of data
Wavelength
vapors

Keywords

  • Automotive
  • Fabry-Perot interferometer
  • Gas sensing
  • Microspectrometers
  • MOEMS
  • NIR - MIR

Cite this

Akujärvi, A., Guo, B., Mannila, R., & Rissanen, A. (2016). MOEMS FPI sensors for NIR-MIR microspectrometer applications. In MOEMS and Miniaturized Systems XV (Vol. 9760). [97600M] International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2214710
Akujärvi, A. ; Guo, B. ; Mannila, R. ; Rissanen, A. / MOEMS FPI sensors for NIR-MIR microspectrometer applications. MOEMS and Miniaturized Systems XV. Vol. 9760 International Society for Optics and Photonics SPIE, 2016.
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abstract = "This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.",
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Akujärvi, A, Guo, B, Mannila, R & Rissanen, A 2016, MOEMS FPI sensors for NIR-MIR microspectrometer applications. in MOEMS and Miniaturized Systems XV. vol. 9760, 97600M, International Society for Optics and Photonics SPIE, MOEMS and Miniaturized Systems XV, San Francisco, United States, 15/02/16. https://doi.org/10.1117/12.2214710

MOEMS FPI sensors for NIR-MIR microspectrometer applications. / Akujärvi, A.; Guo, B.; Mannila, R.; Rissanen, A.

MOEMS and Miniaturized Systems XV. Vol. 9760 International Society for Optics and Photonics SPIE, 2016. 97600M.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

AB - This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

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Akujärvi A, Guo B, Mannila R, Rissanen A. MOEMS FPI sensors for NIR-MIR microspectrometer applications. In MOEMS and Miniaturized Systems XV. Vol. 9760. International Society for Optics and Photonics SPIE. 2016. 97600M https://doi.org/10.1117/12.2214710