MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi, B. Guo, R. Mannila, A. Rissanen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    7 Citations (Scopus)


    This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XV
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)9781628419955
    Publication statusPublished - 1 Jan 2016
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XV - San Francisco, United States
    Duration: 15 Feb 201617 Feb 2016


    ConferenceMOEMS and Miniaturized Systems XV
    Country/TerritoryUnited States
    CitySan Francisco


    • Automotive
    • Fabry-Perot interferometer
    • Gas sensing
    • Microspectrometers
    • MOEMS
    • NIR - MIR


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