Abstract
This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.
| Original language | English |
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| Title of host publication | MOEMS and Miniaturized Systems XV |
| Publisher | International Society for Optics and Photonics SPIE |
| Volume | 9760 |
| ISBN (Electronic) | 9781628419955 |
| DOIs | |
| Publication status | Published - 1 Jan 2016 |
| MoE publication type | A4 Article in a conference publication |
| Event | MOEMS and Miniaturized Systems XV - San Francisco, United States Duration: 15 Feb 2016 → 17 Feb 2016 |
Conference
| Conference | MOEMS and Miniaturized Systems XV |
|---|---|
| Country | United States |
| City | San Francisco |
| Period | 15/02/16 → 17/02/16 |
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Keywords
- Automotive
- Fabry-Perot interferometer
- Gas sensing
- Microspectrometers
- MOEMS
- NIR - MIR