@inproceedings{e05e415fc2734a30943677b30dd1d13f,
title = "MOEMS FPI sensors for NIR-MIR microspectrometer applications",
abstract = "This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 - 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 - 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.",
keywords = "Automotive, Fabry-Perot interferometer, Gas sensing, Microspectrometers, MOEMS, NIR - MIR",
author = "Altti Akuj{\"a}rvi and Bin Guo and Rami Mannila and Anna Rissanen",
year = "2016",
month = jan,
day = "1",
doi = "10.1117/12.2214710",
language = "English",
isbn = "978-1-62841-995-5",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XV",
address = "United States",
note = "MOEMS and Miniaturized Systems XV ; Conference date: 15-02-2016 Through 17-02-2016",
}