MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen, Altti Akujärvi, Jarkko Antila, Martti Blomberg, Heikki Saari

Research output: Contribution to journalArticleScientificpeer-review

Abstract

New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.
Original languageEnglish
Article number023003
Number of pages6
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume11
Issue number2
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Fingerprint

MOEMS
microoptoelectromechanical systems
Fabry-Perot interferometers
Spectrometers
spectrometers
Imaging techniques
filters
water quality
environmental monitoring
Optical filters
Spectral resolution
Process monitoring
Bioelectric potentials
imaging spectrometers
Health care
spectral resolution
Water quality
microelectromechanical systems
health
MEMS

Keywords

  • Hyperspectral sensors
  • multispectral image sensors
  • Fabry-Perot Interferometer
  • MEMS
  • MOEMS
  • imaging spectrometer
  • medical imaging

Cite this

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title = "MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers",
abstract = "New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90{\%}), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.",
keywords = "Hyperspectral sensors, multispectral image sensors, Fabry-Perot Interferometer, MEMS, MOEMS, imaging spectrometer, medical imaging",
author = "Anna Rissanen and Altti Akuj{\"a}rvi and Jarkko Antila and Martti Blomberg and Heikki Saari",
year = "2012",
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language = "English",
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journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
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}

MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers. / Rissanen, Anna; Akujärvi, Altti; Antila, Jarkko; Blomberg, Martti; Saari, Heikki.

In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 11, No. 2, 023003, 2012.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

AU - Rissanen, Anna

AU - Akujärvi, Altti

AU - Antila, Jarkko

AU - Blomberg, Martti

AU - Saari, Heikki

PY - 2012

Y1 - 2012

N2 - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

AB - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

KW - Hyperspectral sensors

KW - multispectral image sensors

KW - Fabry-Perot Interferometer

KW - MEMS

KW - MOEMS

KW - imaging spectrometer

KW - medical imaging

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DO - 10.1117/1.JMM.11.2.023003

M3 - Article

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JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

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