MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen, Altti Akujärvi, Jarkko Antila, Martti Blomberg, Heikki Saari

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.
    Original languageEnglish
    Article number023003
    Number of pages6
    JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
    Volume11
    Issue number2
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Hyperspectral sensors
    • multispectral image sensors
    • Fabry-Perot Interferometer
    • MEMS
    • MOEMS
    • imaging spectrometer
    • medical imaging

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