MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen, Altti Akujärvi, Jarkko Antila, Martti Blomberg, Heikki Saari

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.
    Original languageEnglish
    Article number023003
    Number of pages6
    JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
    Volume11
    Issue number2
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    MOEMS
    microoptoelectromechanical systems
    Fabry-Perot interferometers
    Spectrometers
    spectrometers
    Imaging techniques
    filters
    water quality
    environmental monitoring
    Optical filters
    Spectral resolution
    Process monitoring
    Bioelectric potentials
    imaging spectrometers
    Health care
    spectral resolution
    Water quality
    microelectromechanical systems
    health
    MEMS

    Keywords

    • Hyperspectral sensors
    • multispectral image sensors
    • Fabry-Perot Interferometer
    • MEMS
    • MOEMS
    • imaging spectrometer
    • medical imaging

    Cite this

    @article{fe3b5e8255494297b1a9d1815d4c56d2,
    title = "MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers",
    abstract = "New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90{\%}), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.",
    keywords = "Hyperspectral sensors, multispectral image sensors, Fabry-Perot Interferometer, MEMS, MOEMS, imaging spectrometer, medical imaging",
    author = "Anna Rissanen and Altti Akuj{\"a}rvi and Jarkko Antila and Martti Blomberg and Heikki Saari",
    year = "2012",
    doi = "10.1117/1.JMM.11.2.023003",
    language = "English",
    volume = "11",
    journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
    issn = "1932-5150",
    publisher = "International Society for Optics and Photonics SPIE",
    number = "2",

    }

    MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers. / Rissanen, Anna; Akujärvi, Altti; Antila, Jarkko; Blomberg, Martti; Saari, Heikki.

    In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 11, No. 2, 023003, 2012.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

    AU - Rissanen, Anna

    AU - Akujärvi, Altti

    AU - Antila, Jarkko

    AU - Blomberg, Martti

    AU - Saari, Heikki

    PY - 2012

    Y1 - 2012

    N2 - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

    AB - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

    KW - Hyperspectral sensors

    KW - multispectral image sensors

    KW - Fabry-Perot Interferometer

    KW - MEMS

    KW - MOEMS

    KW - imaging spectrometer

    KW - medical imaging

    U2 - 10.1117/1.JMM.11.2.023003

    DO - 10.1117/1.JMM.11.2.023003

    M3 - Article

    VL - 11

    JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

    JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

    SN - 1932-5150

    IS - 2

    M1 - 023003

    ER -