MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen; Altti Akujärvi; Jarkko Antila; Martti Blomberg; Heikki Saari

doi:10.1117/1.JMM.11.2.023003

MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen, Altti Akujärvi, Jarkko Antila, Martti Blomberg, Heikki Saari

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420 nm and λ = 670 nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

Original language	English
Article number	023003
Number of pages	6
Journal	Journal of Micro/ Nanolithography, MEMS, and MOEMS
Volume	11
Issue number	2
DOIs	https://doi.org/10.1117/1.JMM.11.2.023003
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Keywords

Hyperspectral sensors
multispectral image sensors
Fabry-Perot Interferometer
MEMS
MOEMS
imaging spectrometer
medical imaging

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@article{fe3b5e8255494297b1a9d1815d4c56d2,

title = "MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers",

abstract = "New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420 nm and λ = 670 nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.",

keywords = "Hyperspectral sensors, multispectral image sensors, Fabry-Perot Interferometer, MEMS, MOEMS, imaging spectrometer, medical imaging",

author = "Anna Rissanen and Altti Akuj{\"a}rvi and Jarkko Antila and Martti Blomberg and Heikki Saari",

year = "2012",

doi = "10.1117/1.JMM.11.2.023003",

language = "English",

volume = "11",

journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",

issn = "1932-5150",

publisher = "International Society for Optics and Photonics SPIE",

number = "2",

}

TY - JOUR

T1 - MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

AU - Rissanen, Anna

AU - Akujärvi, Altti

AU - Antila, Jarkko

AU - Blomberg, Martti

AU - Saari, Heikki

PY - 2012

Y1 - 2012

N2 - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420 nm and λ = 670 nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

AB - New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420 nm and λ = 670 nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

KW - Hyperspectral sensors

KW - multispectral image sensors

KW - Fabry-Perot Interferometer

KW - MEMS

KW - MOEMS

KW - imaging spectrometer

KW - medical imaging

U2 - 10.1117/1.JMM.11.2.023003

DO - 10.1117/1.JMM.11.2.023003

M3 - Article

SN - 1932-5150

VL - 11

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

IS - 2

M1 - 023003

ER -

MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

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Keywords

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