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Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

  • Laura Keskiväli*
  • , Matti Putkonen
  • , Eini Puhakka
  • , Eija Kenttä
  • , Jeroen Kint
  • , Ranjith K. Ramachandran
  • , Christophe Detavernier
  • , Pekka Simell
    • *Corresponding author for this work
    • University of Helsinki
    • Ghent University

    Research output: Contribution to journal › Article › Scientific › peer-review

    13   Link opens in a new tab Citations (Scopus)

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