Monolithic integration of millimeter-wave RF-MEMS switch circuits and LNAs using a GaAs MMIC foundry process technology

R. Malmqvist, C. Samuelsson, A. Gustafsson, D. Smith, Tauno Vähä-Heikkilä, R. Baggen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

    Abstract

    Wideband millimeter-wave RF-MEMS switch networks and active RF circuits have been monolithically integrated on the same GaAs wafer using an MMIC foundry process technology. GaAs MEMS SPST and SPDT switches present below 1 dB of insertion loss and more than 8 dB/20 dB of isolation up to 75 GHz and 40 GHz, respectively. A compact 1-bit Ka-band GaAs MEMS phase shifter circuit achieve a high figure-of-merit with respect to low in-band losses for a given phase shift. The demonstrated on-wafer integration of two wideband LNAs further show the capabilities of realizing highly integrated (single-chip) reconfigurable active RF-MEMS based MMICs and front-ends at millimeter-wave frequencies
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages148-151
    ISBN (Electronic)978-1-61284-965-2
    ISBN (Print)978-1-61284-963-8, 978-1-61284-964-5
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    Event2011 IEEE MTT-S International Microwave Workshop on Millimeter Wave Integration Technologies, IMWS 2011, Collocated with the 2011 IEEE RFID - Technologies and Applications Conference, RFID-TA 2011 - Sitges, Spain
    Duration: 15 Sep 201116 Sep 2011

    Conference

    Conference2011 IEEE MTT-S International Microwave Workshop on Millimeter Wave Integration Technologies, IMWS 2011, Collocated with the 2011 IEEE RFID - Technologies and Applications Conference, RFID-TA 2011
    Abbreviated titleIMWS 2011
    Country/TerritorySpain
    CitySitges
    Period15/09/1116/09/11

    Keywords

    • Low noise amplifiers
    • MMIC
    • radio frequency microelectromechanical systems
    • switches

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