Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

Keyphrases

• Readout Circuit 100%
• SOI-MEMS 100%
• Bulk CMOS 100%
• CMOS Readout Circuit 100%
• MEMS Capacitive Pressure Sensor 100%
• Circuit-based 50%
• Pressure Sensor 50%
• Micromechanics 50%
• Buried Oxide 50%
• Capacitive Pressure Sensor 50%
• SOI Wafer 50%
• CMOS Process 50%
• Vacuum Cavity 50%
• Low Power CMOS 50%
• Sensing Circuit 50%
• Relaxation Oscillator 50%

Engineering

• Capacitive 100%
• Microelectromechanical System 100%
• Readout Circuit 100%
• Pressure Sensor 100%
• Oscillator 33%

INIS

• sensors 100%
• readout systems 100%
• oxides 33%
• relaxation 33%
• power 33%
• cavities 33%
• oscillators 33%