@inproceedings{c5d3774d72454ab486d5bbb2cd964c0d,
title = "Monolithically integratable broad-band anti-reflection stacks for Si photonics platforms",
abstract = "Based on commonly used dielectric materials in Si processing platforms, multiple-layer anti-reflection stacks were designed and fabricated, with the main goal of highly efficient light coupling for Si waveguides over a wide wavelength range. Initial characterization results indicate that a <-20dB light reflection was successfully achieved over 1310-1550 nm wavelength range over the whole 150mm wafer. The fluctuation of reflection spectra over the whole wafer was observed to be only 1-2 dB, which guarantees the high yield and mass production capabilities for further applications.",
keywords = "anti-reflection, broadband, monolithic integration, optical coupling, optical waveguide, silicon photonics",
author = "Fei Sun and Mikko Harjanne and P{\"a}ivi Heimala and Markku Kapulainen and Timo Aalto",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; Integrated Optics: Devices, Materials, and Technologies XXVII 2023 ; Conference date: 30-01-2023 Through 02-02-2023",
year = "2023",
month = mar,
day = "17",
doi = "10.1117/12.2647717",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Garcia-Blanco, {Sonia M.} and Pavel Cheben",
booktitle = "Integrated Optics",
address = "United States",
}