Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI

Anna Rissanen (Corresponding Author), Uula Kantojärvi, Martti Blomberg, Jarkko Antila, Simo Eränen

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Abstract

We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunable MEMS Fabry-Perot interferometer (FPI) monolithically integrated on a PIN photodiode using IC compatible microfabrication techniques. MEMS FPI is an electrostatically (AC voltage) actuated structure consisting of two parallel atomic layer deposited Bragg mirror stacks of Al2O3/TiO2 with imbedded circular aluminum electrodes on top and the bottom for capacitive tuning capability for the wavelength range of 420–550 nm. The fabrication process flow for the successful completion of the device is presented. The spectral response of the device ranges from 0.1 A/W at λ = 420 nm to 0.2 A/W at λ = 550 nm, with transmission peak width of 8 nm at 540 nm. These results indicate photodiode performance that matches the sensitivity levels typical for commercially available photodiodes in this wavelength range as well as excellent transmission properties of the integrated FPI filter structure, while the monolithical fabrication process offers increased spectrometer robustness and mass production capability.
Original languageEnglish
Pages (from-to)130-135
Number of pages5
JournalSensors and Actuators A: Physical
Volume182
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Fingerprint

Fabry-Perot interferometers
Photodiodes
microelectromechanical systems
MEMS
photodiodes
chips
Fabrication
Wavelength
fabrication
Microfabrication
Bragg reflectors
Aluminum
spectral sensitivity
wavelengths
Spectrometers
alternating current
Mirrors
Tuning
tuning
spectrometers

Keywords

  • Fabry-Perot interferometer
  • MEMS
  • microspectrometer-on-chip

Cite this

Rissanen, Anna ; Kantojärvi, Uula ; Blomberg, Martti ; Antila, Jarkko ; Eränen, Simo. / Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI. In: Sensors and Actuators A: Physical. 2012 ; Vol. 182. pp. 130-135.
@article{7c76e49460844b069d2bd5e05e1d888f,
title = "Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI",
abstract = "We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunable MEMS Fabry-Perot interferometer (FPI) monolithically integrated on a PIN photodiode using IC compatible microfabrication techniques. MEMS FPI is an electrostatically (AC voltage) actuated structure consisting of two parallel atomic layer deposited Bragg mirror stacks of Al2O3/TiO2 with imbedded circular aluminum electrodes on top and the bottom for capacitive tuning capability for the wavelength range of 420–550 nm. The fabrication process flow for the successful completion of the device is presented. The spectral response of the device ranges from 0.1 A/W at λ = 420 nm to 0.2 A/W at λ = 550 nm, with transmission peak width of 8 nm at 540 nm. These results indicate photodiode performance that matches the sensitivity levels typical for commercially available photodiodes in this wavelength range as well as excellent transmission properties of the integrated FPI filter structure, while the monolithical fabrication process offers increased spectrometer robustness and mass production capability.",
keywords = "Fabry-Perot interferometer, MEMS, microspectrometer-on-chip",
author = "Anna Rissanen and Uula Kantoj{\"a}rvi and Martti Blomberg and Jarkko Antila and Simo Er{\"a}nen",
year = "2012",
doi = "10.1016/j.sna.2012.05.023",
language = "English",
volume = "182",
pages = "130--135",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI. / Rissanen, Anna (Corresponding Author); Kantojärvi, Uula; Blomberg, Martti; Antila, Jarkko; Eränen, Simo.

In: Sensors and Actuators A: Physical, Vol. 182, 2012, p. 130-135.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI

AU - Rissanen, Anna

AU - Kantojärvi, Uula

AU - Blomberg, Martti

AU - Antila, Jarkko

AU - Eränen, Simo

PY - 2012

Y1 - 2012

N2 - We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunable MEMS Fabry-Perot interferometer (FPI) monolithically integrated on a PIN photodiode using IC compatible microfabrication techniques. MEMS FPI is an electrostatically (AC voltage) actuated structure consisting of two parallel atomic layer deposited Bragg mirror stacks of Al2O3/TiO2 with imbedded circular aluminum electrodes on top and the bottom for capacitive tuning capability for the wavelength range of 420–550 nm. The fabrication process flow for the successful completion of the device is presented. The spectral response of the device ranges from 0.1 A/W at λ = 420 nm to 0.2 A/W at λ = 550 nm, with transmission peak width of 8 nm at 540 nm. These results indicate photodiode performance that matches the sensitivity levels typical for commercially available photodiodes in this wavelength range as well as excellent transmission properties of the integrated FPI filter structure, while the monolithical fabrication process offers increased spectrometer robustness and mass production capability.

AB - We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunable MEMS Fabry-Perot interferometer (FPI) monolithically integrated on a PIN photodiode using IC compatible microfabrication techniques. MEMS FPI is an electrostatically (AC voltage) actuated structure consisting of two parallel atomic layer deposited Bragg mirror stacks of Al2O3/TiO2 with imbedded circular aluminum electrodes on top and the bottom for capacitive tuning capability for the wavelength range of 420–550 nm. The fabrication process flow for the successful completion of the device is presented. The spectral response of the device ranges from 0.1 A/W at λ = 420 nm to 0.2 A/W at λ = 550 nm, with transmission peak width of 8 nm at 540 nm. These results indicate photodiode performance that matches the sensitivity levels typical for commercially available photodiodes in this wavelength range as well as excellent transmission properties of the integrated FPI filter structure, while the monolithical fabrication process offers increased spectrometer robustness and mass production capability.

KW - Fabry-Perot interferometer

KW - MEMS

KW - microspectrometer-on-chip

U2 - 10.1016/j.sna.2012.05.023

DO - 10.1016/j.sna.2012.05.023

M3 - Article

VL - 182

SP - 130

EP - 135

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -