Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Panu Pekko; Ville Kaajakari; Marko Koort; Hannu Ronkainen; Aarne Oja

Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Panu Pekko, Ville Kaajakari, Marko Koort, Hannu Ronkainen, Aarne Oja

Micro Analog Systems Oy

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

A square-extensional 13.6 MHz MEMS-resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plug-up method.

Original language	English
Title of host publication	MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems
Publication status	Published - 2006
MoE publication type	Not Eligible
Event	7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006 - Orvieto, Italy Duration: 27 Jun 2006 → 30 Jun 2006

Conference

Conference	7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006
Country/Territory	Italy
City	Orvieto
Period	27/06/06 → 30/06/06

Keywords

MEMS
CMOS
Monolithical Integration
Plug-up
Resonator

Cite this

@inproceedings{80f2f78648714e108a2dc927be1f6de9,

title = "Monolithically integrated square-extensional 13.6 MHz MEMS resonator",

abstract = "A square-extensional 13.6 MHz MEMS-resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plug-up method.",

keywords = "MEMS, CMOS, Monolithical Integration, Plug-up, Resonator",

author = "Panu Pekko and Ville Kaajakari and Marko Koort and Hannu Ronkainen and Aarne Oja",

note = "Project code: T4SU00034; 7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006 ; Conference date: 27-06-2006 Through 30-06-2006",

year = "2006",

language = "English",

booktitle = "MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems",

}

TY - GEN

T1 - Monolithically integrated square-extensional 13.6 MHz MEMS resonator

AU - Pekko, Panu

AU - Kaajakari, Ville

AU - Koort, Marko

AU - Ronkainen, Hannu

AU - Oja, Aarne

N1 - Project code: T4SU00034

PY - 2006

Y1 - 2006

N2 - A square-extensional 13.6 MHz MEMS-resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plug-up method.

AB - A square-extensional 13.6 MHz MEMS-resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plug-up method.

KW - MEMS

KW - CMOS

KW - Monolithical Integration

KW - Plug-up

KW - Resonator

M3 - Conference article in proceedings

BT - MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems

T2 - 7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006

Y2 - 27 June 2006 through 30 June 2006

ER -

Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Abstract

Conference

Keywords

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Cite this