Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Panu Pekko, Ville Kaajakari, Marko Koort, Hannu Ronkainen, Aarne Oja

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    A square-extensional 13.6 MHz MEMS-resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plug-up method.
    Original languageEnglish
    Title of host publicationMEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems
    Publication statusPublished - 2006
    MoE publication typeNot Eligible
    Event7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006 - Orvieto, Italy
    Duration: 27 Jun 200630 Jun 2006

    Conference

    Conference7th International Conference on RF MEMS and RF Microsystems, MEMSWAVE 2006
    CountryItaly
    CityOrvieto
    Period27/06/0630/06/06

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    Keywords

    • MEMS
    • CMOS
    • Monolithical Integration
    • Plug-up
    • Resonator

    Cite this

    Pekko, P., Kaajakari, V., Koort, M., Ronkainen, H., & Oja, A. (2006). Monolithically integrated square-extensional 13.6 MHz MEMS resonator. In MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems