Engineering
Depth Profile
100%
Al Content
100%
Optical Quality
100%
Ray Diffraction
100%
High Resolution
100%
Phase Composition
100%
Barrier Layer
100%
Keyphrases
Metal Organic Vapor Phase Epitaxy (MOVPE)
100%
Epitaxy Growth
100%
MQW Structure
100%
InAlGaN
100%
Indium Gallium Nitride (InGaN)
100%
In Content
57%
Secondary Ion Mass Spectrometry
14%
Barrier Layer
14%
Optical Quality
14%
Non-uniform Distribution
14%
Al Content
14%
High-resolution X-ray Diffraction (HRXRD)
14%
Compositional Depth Profiling
14%
INIS
growth
100%
films
100%
vapor phase epitaxy
100%
increasing
40%
interfaces
20%
precursor
20%
distribution
20%
depth
20%
ions
20%
barrier layer
20%
resolution
20%
mass spectrometry
20%
x-ray diffraction
20%
gallium nitrides
20%
Material Science
Vapor Phase Epitaxy
100%
Film
100%
High Resolution X-Ray Diffraction
20%
Secondary Ion Mass Spectrometry
20%
Mass Spectrometry
20%
Phase Composition
20%
Chemical Engineering
Metallorganic Chemical Vapor Deposition
100%
Film
100%
Secondary Ion Mass Spectrometry
20%
Agricultural and Biological Sciences
X-Ray Diffraction
100%
Secondary Ion Mass Spectrometry
100%
Immunology and Microbiology
High Resolution X-Ray Diffraction
100%