Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty

Ville Heikkinen (Corresponding Author), Johan Nysten, Ville Byman, Björn Hemming, Antti Lassila

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
19 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Nursing and Health Professions

Engineering

Physics

Material Science