Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Mikko Kiviranta, Oliver Brandel, Leif Grönberg, Jürgen Kuner, Sven Linzen, Nikolai Beev, Torsten May, Mika Prunnila

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)

    Abstract

    We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.
    Original languageEnglish
    Article number7438771
    JournalIEEE Transactions on Applied Superconductivity
    Volume26
    Issue number6
    DOIs
    Publication statusPublished - 2016
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    foundries
    Foundries
    Josephson junctions
    layouts
    Multilayers
    Finland
    Fabrication
    fabrication
    Networks (circuits)
    Germany
    Masks
    masks
    manufacturing
    Thin films
    thin films

    Keywords

    • Josephson junctions (JJs)
    • multiplexing
    • superconducting integrated circuits
    • superconducting radiation detectors

    Cite this

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    title = "Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries",
    abstract = "We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.",
    keywords = "Josephson junctions (JJs), multiplexing, superconducting integrated circuits, superconducting radiation detectors",
    author = "Mikko Kiviranta and Oliver Brandel and Leif Gr{\"o}nberg and J{\"u}rgen Kuner and Sven Linzen and Nikolai Beev and Torsten May and Mika Prunnila",
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    doi = "10.1109/TASC.2016.2544821",
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    journal = "IEEE Transactions on Applied Superconductivity",
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    Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries. / Kiviranta, Mikko; Brandel, Oliver; Grönberg, Leif; Kuner, Jürgen; Linzen, Sven; Beev, Nikolai; May, Torsten; Prunnila, Mika.

    In: IEEE Transactions on Applied Superconductivity, Vol. 26, No. 6, 7438771, 2016.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

    AU - Kiviranta, Mikko

    AU - Brandel, Oliver

    AU - Grönberg, Leif

    AU - Kuner, Jürgen

    AU - Linzen, Sven

    AU - Beev, Nikolai

    AU - May, Torsten

    AU - Prunnila, Mika

    PY - 2016

    Y1 - 2016

    N2 - We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.

    AB - We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.

    KW - Josephson junctions (JJs)

    KW - multiplexing

    KW - superconducting integrated circuits

    KW - superconducting radiation detectors

    U2 - 10.1109/TASC.2016.2544821

    DO - 10.1109/TASC.2016.2544821

    M3 - Article

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    JO - IEEE Transactions on Applied Superconductivity

    JF - IEEE Transactions on Applied Superconductivity

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    M1 - 7438771

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