We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.
- Josephson junctions (JJs)
- superconducting integrated circuits
- superconducting radiation detectors
Kiviranta, M., Brandel, O., Grönberg, L., Kuner, J., Linzen, S., Beev, N., May, T., & Prunnila, M. (2016). Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries. IEEE Transactions on Applied Superconductivity, 26(6), . https://doi.org/10.1109/TASC.2016.2544821