Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Mikko Kiviranta, Oliver Brandel, Leif Grönberg, Jürgen Kuner, Sven Linzen, Nikolai Beev, Torsten May, Mika Prunnila

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)

    Abstract

    We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.
    Original languageEnglish
    Article number7438771
    JournalIEEE Transactions on Applied Superconductivity
    Volume26
    Issue number6
    DOIs
    Publication statusPublished - 2016
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Josephson junctions (JJs)
    • multiplexing
    • superconducting integrated circuits
    • superconducting radiation detectors
    • OtaNano

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