Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Mikko Kiviranta, Oliver Brandel, Leif Grönberg, Jürgen Kuner, Sven Linzen, Nikolai Beev, Torsten May, Mika Prunnila

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Abstract

We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.
Original languageEnglish
Article number7438771
JournalIEEE Transactions on Applied Superconductivity
Volume26
Issue number6
DOIs
Publication statusPublished - 2016
MoE publication typeA1 Journal article-refereed

Fingerprint

foundries
Foundries
Josephson junctions
layouts
Multilayers
Finland
Fabrication
fabrication
Networks (circuits)
Germany
Masks
masks
manufacturing
Thin films
thin films

Keywords

  • Josephson junctions (JJs)
  • multiplexing
  • superconducting integrated circuits
  • superconducting radiation detectors

Cite this

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title = "Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries",
abstract = "We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.",
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Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries. / Kiviranta, Mikko; Brandel, Oliver; Grönberg, Leif; Kuner, Jürgen; Linzen, Sven; Beev, Nikolai; May, Torsten; Prunnila, Mika.

In: IEEE Transactions on Applied Superconductivity, Vol. 26, No. 6, 7438771, 2016.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

AU - Kiviranta, Mikko

AU - Brandel, Oliver

AU - Grönberg, Leif

AU - Kuner, Jürgen

AU - Linzen, Sven

AU - Beev, Nikolai

AU - May, Torsten

AU - Prunnila, Mika

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KW - Josephson junctions (JJs)

KW - multiplexing

KW - superconducting integrated circuits

KW - superconducting radiation detectors

U2 - 10.1109/TASC.2016.2544821

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