Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Mikko Kiviranta; Oliver Brandel; Leif Grönberg; Jürgen Kuner; Sven Linzen; Nikolai Beev; Torsten May; Mika Prunnila

doi:10.1109/TASC.2016.2544821

Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Mikko Kiviranta, Oliver Brandel, Leif Grönberg, Jürgen Kuner, Sven Linzen, Nikolai Beev, Torsten May, Mika Prunnila

Leibniz-Institut fur Photonische Technologien (IPHT)

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

Abstract

We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.

Original language	English
Article number	7438771
Journal	IEEE Transactions on Applied Superconductivity
Volume	26
Issue number	6
DOIs	https://doi.org/10.1109/TASC.2016.2544821
Publication status	Published - 2016
MoE publication type	A1 Journal article-refereed

Keywords

Josephson junctions (JJs)
multiplexing
superconducting integrated circuits
superconducting radiation detectors
OtaNano

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10.1109/TASC.2016.2544821

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VTT Technical Research Centre of Finland
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title = "Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries",

abstract = "We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.",

keywords = "Josephson junctions (JJs), multiplexing, superconducting integrated circuits, superconducting radiation detectors, OtaNano",

author = "Mikko Kiviranta and Oliver Brandel and Leif Gr{\"o}nberg and J{\"u}rgen Kuner and Sven Linzen and Nikolai Beev and Torsten May and Mika Prunnila",

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doi = "10.1109/TASC.2016.2544821",

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journal = "IEEE Transactions on Applied Superconductivity",

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T1 - Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

AU - Kiviranta, Mikko

AU - Brandel, Oliver

AU - Grönberg, Leif

AU - Kuner, Jürgen

AU - Linzen, Sven

AU - Beev, Nikolai

AU - May, Torsten

AU - Prunnila, Mika

PY - 2016

Y1 - 2016

N2 - We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.

AB - We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.

KW - Josephson junctions (JJs)

KW - multiplexing

KW - superconducting integrated circuits

KW - superconducting radiation detectors

KW - OtaNano

U2 - 10.1109/TASC.2016.2544821

DO - 10.1109/TASC.2016.2544821

M3 - Article

SN - 1051-8223

VL - 26

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 6

M1 - 7438771

ER -

Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

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