Multilayer single-mode polymeric waveguides by imprint patterning for optical interconnects

Tia Korhonen, Noora Salminen, Annukka Kokkonen, Noriyuki Masuda, Mikko Karppinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)


Low-loss single-mode waveguides are fabricated for optical interconnection applications. Such waveguides operating at telecom wavelength window are attractive for communicating between micro-photonic integrated circuit chips, such as silicon photonics, on the carrier/package, and also for enhanced coupling of photonic devices to fibers for longer reach interconnects. Manufacturing of the waveguides is based on direct pattering of optical polymeric materials by UV nanoimprinting. The advantages of the technology include the applicability to stack multiple layers of waveguides, fabrication on various substrate materials, and simultaneous fabrication of optical coupling structures. The developed process enables high wafer-level yield with precision overlay alignment. The multilayer waveguides were implemented using the so-called inverted rib waveguide process, that is, the shape of the waveguide cores are imprinted on the undercladding layer as grooves and then the core material is deposited on the cladding layer filling the grooves and also forming a thin slab layer. The subsequent deposition of the upper cladding layer finalizes the first waveguide layer and also starts the manufacturing of the next waveguide layer. The achieved wafer-scale layer-to-layer alignment tolerances were 1.2 µm and
Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationVolume 8991, Optical Interconnects XIV, 2014
PublisherInternational Society for Optics and Photonics SPIE
Number of pages8
ISBN (Print)978-0-8194-9904-2
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventSPIE Optical Interconnects XIV - San Francisco, CA, United States
Duration: 3 Feb 20145 Feb 2014

Publication series

SeriesProceedings of SPIE


ConferenceSPIE Optical Interconnects XIV
CountryUnited States
CitySan Francisco, CA


  • integrated optics
  • optical interconnect
  • optical polymer
  • single-mode waveguide
  • UV nano-imprinting

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