Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Pekka Äyräs (Corresponding Author), Juha Rantala, Raviv Levy, Michael Descour, Seppo Honkanen, Nasser Peyghambarian

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.
Original languageEnglish
Pages (from-to)9-12
Number of pages4
JournalThin Solid Films
Volume352
Issue number1-2
DOIs
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

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gray scale
Sol-gels
Masks
masks
gels
Thin films
thin films
Fabrication
fabrication
strip
Calibration
profiles
Costs

Cite this

Äyräs, P., Rantala, J., Levy, R., Descour, M., Honkanen, S., & Peyghambarian, N. (1999). Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask. Thin Solid Films, 352(1-2), 9-12. https://doi.org/10.1016/S0040-6090(99)00404-6
Äyräs, Pekka ; Rantala, Juha ; Levy, Raviv ; Descour, Michael ; Honkanen, Seppo ; Peyghambarian, Nasser. / Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask. In: Thin Solid Films. 1999 ; Vol. 352, No. 1-2. pp. 9-12.
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Äyräs, P, Rantala, J, Levy, R, Descour, M, Honkanen, S & Peyghambarian, N 1999, 'Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask', Thin Solid Films, vol. 352, no. 1-2, pp. 9-12. https://doi.org/10.1016/S0040-6090(99)00404-6

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask. / Äyräs, Pekka (Corresponding Author); Rantala, Juha; Levy, Raviv; Descour, Michael; Honkanen, Seppo; Peyghambarian, Nasser.

In: Thin Solid Films, Vol. 352, No. 1-2, 1999, p. 9-12.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Äyräs, Pekka

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AU - Honkanen, Seppo

AU - Peyghambarian, Nasser

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AB - Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

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DO - 10.1016/S0040-6090(99)00404-6

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JF - Thin Solid Films

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