Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Pekka Äyräs (Corresponding Author), Juha Rantala, Raviv Levy, Michael Descour, Seppo Honkanen, Nasser Peyghambarian

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.
Original languageEnglish
Pages (from-to)9-12
Number of pages4
JournalThin Solid Films
Volume352
Issue number1-2
DOIs
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

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