Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Pekka Äyräs; Juha Rantala; Raviv Levy; Michael Descour; Seppo Honkanen; Nasser Peyghambarian

doi:10.1016/S0040-6090(99)00404-6

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Pekka Äyräs^*
, Juha Rantala
, Raviv Levy
, Michael Descour
, Seppo Honkanen
, Nasser Peyghambarian

^*Corresponding author for this work

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

26 Citations (Scopus)

Abstract

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

Original language	English
Pages (from-to)	9-12
Journal	Thin Solid Films
Volume	352
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(99)00404-6
Publication status	Published - 1999
MoE publication type	A1 Journal article-refereed

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title = "Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask",

abstract = "Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.",

author = "Pekka {\"A}yr{\"a}s and Juha Rantala and Raviv Levy and Michael Descour and Seppo Honkanen and Nasser Peyghambarian",

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T1 - Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

AU - Äyräs, Pekka

AU - Rantala, Juha

AU - Levy, Raviv

AU - Descour, Michael

AU - Honkanen, Seppo

AU - Peyghambarian, Nasser

PY - 1999

Y1 - 1999

N2 - Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

AB - Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

U2 - 10.1016/S0040-6090(99)00404-6

DO - 10.1016/S0040-6090(99)00404-6

M3 - Article

SN - 0040-6090

VL - 352

SP - 9

EP - 12

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Abstract

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