Multipass grating interferometer applied to line narrowing in excimer lasers

Jouni Partanen

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3 Citations (Scopus)


The line narrowing of excimer lasers is discussed. The theory for an optical two-effect intracavity line narrowing device, the multipass grating interferometer (MGI), is presented. An MGI contains a grating aligned in its second-order Littrow configuration and a mirror aligned parallel to the grating surface reflecting back the beam normal to the grating corresponding to the first-order diffraction. The Littrow grating is doing the coarse line narrowing, and the mirror aligned parallel to the grating has similar line narrowing properties as tilted intracavity Fabry-Perot etalons. An MGI is applied to a KrF laser cavity to achieve a linewidth of 0.03 cm−1.

Original languageEnglish
Pages (from-to)3810 - 3815
Number of pages6
JournalApplied Optics
Issue number21
Publication statusPublished - 1986
MoE publication typeNot Eligible


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