Multipass grating interferometer applied to line narrowing in excimer lasers

Jouni Partanen

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Abstract

The line narrowing of excimer lasers is discussed. The theory for an optical two-effect intracavity line narrowing device, the multipass grating interferometer (MGI), is presented. An MGI contains a grating aligned in its second-order Littrow configuration and a mirror aligned parallel to the grating surface reflecting back the beam normal to the grating corresponding to the first-order diffraction. The Littrow grating is doing the coarse line narrowing, and the mirror aligned parallel to the grating has similar line narrowing properties as tilted intracavity Fabry-Perot etalons. An MGI is applied to a KrF laser cavity to achieve a linewidth of 0.03 cm−1.

Original languageEnglish
Pages (from-to)3810 - 3815
Number of pages6
JournalApplied Optics
Volume25
Issue number21
DOIs
Publication statusPublished - 1986
MoE publication typeNot Eligible

Fingerprint

Excimer lasers
excimer lasers
Interferometers
interferometers
Diffraction gratings
gratings
Mirrors
Etalons
Laser resonators
Linewidth
Diffraction
mirrors
etalons
laser cavities
configurations
diffraction

Cite this

Partanen, Jouni. / Multipass grating interferometer applied to line narrowing in excimer lasers. In: Applied Optics. 1986 ; Vol. 25, No. 21. pp. 3810 - 3815.
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Multipass grating interferometer applied to line narrowing in excimer lasers. / Partanen, Jouni.

In: Applied Optics, Vol. 25, No. 21, 1986, p. 3810 - 3815.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Multipass grating interferometer applied to line narrowing in excimer lasers

AU - Partanen, Jouni

PY - 1986

Y1 - 1986

N2 - The line narrowing of excimer lasers is discussed. The theory for an optical two-effect intracavity line narrowing device, the multipass grating interferometer (MGI), is presented. An MGI contains a grating aligned in its second-order Littrow configuration and a mirror aligned parallel to the grating surface reflecting back the beam normal to the grating corresponding to the first-order diffraction. The Littrow grating is doing the coarse line narrowing, and the mirror aligned parallel to the grating has similar line narrowing properties as tilted intracavity Fabry-Perot etalons. An MGI is applied to a KrF laser cavity to achieve a linewidth of 0.03 cm−1.

AB - The line narrowing of excimer lasers is discussed. The theory for an optical two-effect intracavity line narrowing device, the multipass grating interferometer (MGI), is presented. An MGI contains a grating aligned in its second-order Littrow configuration and a mirror aligned parallel to the grating surface reflecting back the beam normal to the grating corresponding to the first-order diffraction. The Littrow grating is doing the coarse line narrowing, and the mirror aligned parallel to the grating has similar line narrowing properties as tilted intracavity Fabry-Perot etalons. An MGI is applied to a KrF laser cavity to achieve a linewidth of 0.03 cm−1.

U2 - 10.1364/AO.25.003810

DO - 10.1364/AO.25.003810

M3 - Article

VL - 25

SP - 3810

EP - 3815

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 21

ER -