Multiple layer coating scheme to protect polymer films from atomic oxygen erosion

Risto Mutikainen

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

Thin coatings are studied to protect films from atomic oxygen induced erosion. Both single and multiple layer coatings of Al, AlN and multilayered Al/AlN are studied in the thickness range of 5 to 60 nm. The exposures were performed both by a plasma asher and an atomic oxygen beam. The erosion craters were studied with optical and scanning electron microscopes. When comparing single-layer coatings Al and Al/AlN were found to be superior to plain AlN. The multiple layer scheme of separating the protective coatings by a spacing polyimide film was found to be effective in restricting the erosion crater growth only to the spacing polyimide.
Original languageEnglish
Pages (from-to)248-257
Number of pages10
JournalThin Solid Films
Volume238
Issue number2
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Fingerprint Dive into the research topics of 'Multiple layer coating scheme to protect polymer films from atomic oxygen erosion'. Together they form a unique fingerprint.

Cite this