Multiple layer coating scheme to protect polymer films from atomic oxygen erosion

Risto Mutikainen

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Abstract

Thin coatings are studied to protect films from atomic oxygen induced erosion. Both single and multiple layer coatings of Al, AlN and multilayered Al/AlN are studied in the thickness range of 5 to 60 nm. The exposures were performed both by a plasma asher and an atomic oxygen beam. The erosion craters were studied with optical and scanning electron microscopes. When comparing single-layer coatings Al and Al/AlN were found to be superior to plain AlN. The multiple layer scheme of separating the protective coatings by a spacing polyimide film was found to be effective in restricting the erosion crater growth only to the spacing polyimide.
Original languageEnglish
Pages (from-to)248-257
Number of pages10
JournalThin Solid Films
Volume238
Issue number2
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Fingerprint

Polymer films
erosion
Erosion
Oxygen
polyimides
coatings
Polyimides
craters
Coatings
polymers
oxygen
spacing
protective coatings
Protective coatings
plains
Electron microscopes
electron microscopes
Scanning
Plasmas
scanning

Cite this

Mutikainen, Risto. / Multiple layer coating scheme to protect polymer films from atomic oxygen erosion. In: Thin Solid Films. 1994 ; Vol. 238, No. 2. pp. 248-257.
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Multiple layer coating scheme to protect polymer films from atomic oxygen erosion. / Mutikainen, Risto.

In: Thin Solid Films, Vol. 238, No. 2, 1994, p. 248-257.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Multiple layer coating scheme to protect polymer films from atomic oxygen erosion

AU - Mutikainen, Risto

N1 - Project code: puo2012

PY - 1994

Y1 - 1994

N2 - Thin coatings are studied to protect films from atomic oxygen induced erosion. Both single and multiple layer coatings of Al, AlN and multilayered Al/AlN are studied in the thickness range of 5 to 60 nm. The exposures were performed both by a plasma asher and an atomic oxygen beam. The erosion craters were studied with optical and scanning electron microscopes. When comparing single-layer coatings Al and Al/AlN were found to be superior to plain AlN. The multiple layer scheme of separating the protective coatings by a spacing polyimide film was found to be effective in restricting the erosion crater growth only to the spacing polyimide.

AB - Thin coatings are studied to protect films from atomic oxygen induced erosion. Both single and multiple layer coatings of Al, AlN and multilayered Al/AlN are studied in the thickness range of 5 to 60 nm. The exposures were performed both by a plasma asher and an atomic oxygen beam. The erosion craters were studied with optical and scanning electron microscopes. When comparing single-layer coatings Al and Al/AlN were found to be superior to plain AlN. The multiple layer scheme of separating the protective coatings by a spacing polyimide film was found to be effective in restricting the erosion crater growth only to the spacing polyimide.

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DO - 10.1016/0040-6090(94)90062-0

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JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

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