Multiple layer coating scheme to protect polymer films from atomic oxygen erosion

Thin coatings are studied to protect films from atomic oxygen induced erosion. Both single and multiple layer coatings of Al, AlN and multilayered Al/AlN are studied in the thickness range of 5 to 60 nm. The exposures were performed both by a plasma asher and an atomic oxygen beam. The erosion craters were studied with optical and scanning electron microscopes. When comparing single-layer coatings Al and Al/AlN were found to be superior to plain AlN. The multiple layer scheme of separating the protective coatings by a spacing polyimide film was found to be effective in restricting the erosion crater growth only to the spacing polyimide.