Nano-porous coatings for gas retention studies

C. Ruset, E. Grigore, M. Rasinski, E. Fortuna, J. Grzonka, M. Gherendi, C. Luculescu, N. P. Barradas, E. Alves, Antti Hakola

    Research output: Contribution to journalArticleScientificpeer-review

    1 Citation (Scopus)


    One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.

    Original languageEnglish
    Article number503
    JournalRomanian Reports in Physics
    Issue number1
    Publication statusPublished - 2019
    MoE publication typeA1 Journal article-refereed


    • Argon
    • Nano-porous coatings
    • Tungsten


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