Abstract
One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.
| Original language | English |
|---|---|
| Article number | 503 |
| Journal | Romanian Reports in Physics |
| Volume | 71 |
| Issue number | 1 |
| Publication status | Published - 2019 |
| MoE publication type | A1 Journal article-refereed |
Funding
This work has been carried out within the framework of the EUROfusion Consortium and has been received funding from the European Union’s Horizon 2020 research innovation programme under grant agreement number 633053 (WPPFC) and also from the Romanian Research Ministry under contracts 1EU-1/2/2016 and CEA-IFA No. C5-10/2016. The reviews and opinion expressed herein do not necessarily reflect those of the European Commission.
Keywords
- Argon
- Nano-porous coatings
- Tungsten