Nano-porous coatings for gas retention studies

C. Ruset, E. Grigore, M. Rasinski, E. Fortuna, J. Grzonka, M. Gherendi, C. Luculescu, N. P. Barradas, E. Alves, A. Hakola

Research output: Contribution to journalArticleScientificpeer-review

Abstract

One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.

Original languageEnglish
Article number503
JournalRomanian Reports in Physics
Volume71
Issue number1
Publication statusPublished - 2019
MoE publication typeA1 Journal article-refereed

Keywords

  • Argon
  • Nano-porous coatings
  • Tungsten

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    Ruset, C., Grigore, E., Rasinski, M., Fortuna, E., Grzonka, J., Gherendi, M., Luculescu, C., Barradas, N. P., Alves, E., & Hakola, A. (2019). Nano-porous coatings for gas retention studies. Romanian Reports in Physics, 71(1), [503].