Abstract
One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.
| Original language | English |
|---|---|
| Article number | 503 |
| Journal | Romanian Reports in Physics |
| Volume | 71 |
| Issue number | 1 |
| Publication status | Published - 2019 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- Argon
- Nano-porous coatings
- Tungsten
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Nano-porous coatings for gas retention studies. / Ruset, C.; Grigore, E.; Rasinski, M.; Fortuna, E.; Grzonka, J.; Gherendi, M.; Luculescu, C.; Barradas, N. P.; Alves, E.; Hakola, A.
In: Romanian Reports in Physics, Vol. 71, No. 1, 503, 2019.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Nano-porous coatings for gas retention studies
AU - Ruset, C.
AU - Grigore, E.
AU - Rasinski, M.
AU - Fortuna, E.
AU - Grzonka, J.
AU - Gherendi, M.
AU - Luculescu, C.
AU - Barradas, N. P.
AU - Alves, E.
AU - Hakola, A.
PY - 2019
Y1 - 2019
N2 - One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.
AB - One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.
KW - Argon
KW - Nano-porous coatings
KW - Tungsten
UR - http://www.scopus.com/inward/record.url?scp=85063568391&partnerID=8YFLogxK
M3 - Article
VL - 71
JO - Romanian Reports in Physics
JF - Romanian Reports in Physics
SN - 1221-1451
IS - 1
M1 - 503
ER -