One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mm in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950°C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9 × 10 20 atoms/m 2 while in compact W coating of the same thickness only 2.7 × 10 19 atoms/m 2 it was found.
|Journal||Romanian Reports in Physics|
|Publication status||Published - 2019|
|MoE publication type||A1 Journal article-refereed|
- Nano-porous coatings