Abstract
Nanocrystalline silicon is a promising material for nano-opto-electro-mechanical metamaterials to be integrated into information and communication technology. The fabrication of nanocrystalline silicon has an impact on properties associated to grain sizes and grain boundaries, which influence the mechanical quality factor of one-dimensional nanoresonators.
| Original language | English |
|---|---|
| Title of host publication | META 2025 Torremolinos - Spain |
| Subtitle of host publication | The 15th International Conference on Metamaterials, Photonic Crystals and Plasmonics |
| Pages | 882-883 |
| Number of pages | 2 |
| Publication status | Published - 2025 |
| Event | 15th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2025 - Malaga, Spain Duration: 22 Jul 2025 → 25 Jul 2025 |
Publication series
| Series | META Proceedings |
|---|---|
| ISSN | 2429-1390 |
Conference
| Conference | 15th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2025 |
|---|---|
| Country/Territory | Spain |
| City | Malaga |
| Period | 22/07/25 → 25/07/25 |
Funding
The authors acknowledge funding from the project MAGNIFIC (HORIZON-CL4-2022-RESILIENCE-01, Grant Agreement No. 101091968)