Nanoimprint active and passive devices

I. Maximov, P. Carlberg, M. Beck, E.L. Sarwe, L. Montelius, J. Seekamp, S. Zankovych, H.C. Scheer, C.M. Sotomayor Torres, Ch. Cardinaud, K. Pfeiffer, F. Reuther, M. Fink, G. Grueztner, Tomi Haatainen, Jorma Salmi, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology
    Place of PublicationSan Francisco
    PublisherNaval Research Laboratory
    Pages89-90
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
    Duration: 11 Dec 200213 Dec 2002
    http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

    Conference

    Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
    Abbreviated titleNNT 2002
    CountryUnited States
    CitySan Francisco
    Period11/12/0213/12/02
    Internet address

    Keywords

    • Nanoimprint Lithography

    Cite this

    Maximov, I., Carlberg, P., Beck, M., Sarwe, E. L., Montelius, L., Seekamp, J., Zankovych, S., Scheer, H. C., Sotomayor Torres, C. M., Cardinaud, C., Pfeiffer, K., Reuther, F., Fink, M., Grueztner, G., Haatainen, T., Salmi, J., & Ahopelto, J. (2002). Nanoimprint active and passive devices. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology (pp. 89-90). Naval Research Laboratory.